Laser point scanning oxygen, nitrogen, hydrogen, argon and helium joint measuring instrument and joint measuring method

Abstract

The invention relates to the field of oxygen-nitrogen-hydrogen-argon-helium analysis in metals and in particular relates to a laser dot type scanning oxygen-nitrogen-hydrogen-argon-helium determinater and a laser dot type scanning oxygen-nitrogen-hydrogen-argon-helium determination method. The problems that the total gas analysis content value can be given through macroscopic analysis means such as an inert gas fusion method and an ion probe and other micro analysis means are low in accuracy and low in reliability in the conventional oxygen-nitrogen-hydrogen-argon-helium analysis in metals are solved. A main body of the laser dot type scanning oxygen-nitrogen-hydrogen-argon-helium determinater consists of the following parts, namely, a laser, a high-temperature high-pressure resistant glass window, a to-be-detected sample stage, a tested sample, a sample injection opening, a mechanical hand, a sample chamber, an anti-pollution bend, a vacuum pump, a three-way valve, a mass spectrum analyzer and a computer. The actions of the laser, the sample stage, the sample injection opening, the mechanical hand, the vacuum pump and the three-way valve can be accurately controlled by control software of the determinater, and the mass spectrum analyzer is controlled to operate according to parameters such as the set emission current. The data processing software of the determinater processes all the information, the feedback is timely provided, the mass spectrometric detection information can be processed, and the result can be accurately calculated and output.

Description

technical field [0001] The invention relates to the field of analysis of oxygen, nitrogen, hydrogen, argon and helium in solid materials such as metals, in particular to a laser point scanning oxygen, nitrogen, hydrogen, argon and helium joint measuring instrument and a joint measuring method. Background technique [0002] As new materials are developed, gases in metals—oxygen, nitrogen, hydrogen, argon, and helium—have an increasingly non-negligible impact on their properties. Gas elements have their own characteristics different from other chemical elements, and their analysis and testing methods also have their own characteristics different from ordinary chemical analysis. The existing macro-analysis methods mainly follow the detection method of gas chromatography, which has been able to accurately measure the gas content of 0.00001% so far. However, the absolute amount of 0.1 μg is still not low enough to be suitable for microanalysis. Mass spectrometry is suitable for...

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Problems solved by technology

[0004] The purpose of the present invention is to provide a laser point scanning oxygen, nitrogen, hydrogen, argon and helium joint measuring instrument and a joint measuring method to solve the problem that in the existing analysis technology of oxygen, nitrogen, hydrogen, argon and helium in metals, the macroscopic analysis methods such as inert gas melting method can only give The total content value of gas analysis, the problem of poor accuracy and low reliability of microscopic analysis methods such as ion probes

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