Semiconductor test structure and its test method, detection method

A technology for testing structures and semiconductors, which is used in semiconductor/solid-state device testing/measurement, semiconductor devices, and semiconductor/solid-state device components, etc. It can solve problems that affect the stability of SRAM memory, the easy formation of defects in dual damascene structures, and the lack of effective detection of dual damascene. Problems such as mosaic structure defects, to achieve the effect of simple test method, space saving and high efficiency

Active Publication Date: 2017-06-13
SEMICON MFG INT (SHANGHAI) CORP
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Problems solved by technology

[0006] The existing dual damascene structure is formed by the electroplating process, but with the continuous reduction of the feature size, defects are easily formed in the dual damascene structure, which affects the stability of the final SRAM memory. However, there is no effective detection of the dual damascene structure. flawed method

Method used

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  • Semiconductor test structure and its test method, detection method
  • Semiconductor test structure and its test method, detection method
  • Semiconductor test structure and its test method, detection method

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Embodiment Construction

[0038] The inventor found in the existing process of making SRAM memory that the electroplating process is used to form a dual damascene structure for connecting metal interconnection lines, word lines and bit lines with the gate, source or drain of transistors in memory cells. At this time, due to the continuous reduction of feature size, it is easy to form defects such as voids in the dual damascene structure. The existence of defects such as voids will affect the electrical performance of the dual damascene structure, and ultimately affect the stability of the SRAM memory of the formed semiconductor device.

[0039] The inventors have further studied and found that when forming a dual damascene structure, it is necessary to form through holes and grooves connected to the through holes in the dielectric layer, and when filling metal copper in the grooves and through holes, the size and arrangement direction of the grooves, It will have a great impact on the filling performanc...

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Abstract

A semiconductor test structure and a test method thereof, wherein the semiconductor test structure consists of a plurality of dual damascene structures distributed in rows and columns to form a plurality of sub-test chains in series, the head end of the sub-test chain is connected to the head end, and the tail end and the tail end are connected. The terminals are connected to connect several sub-test chains in series to form a semiconductor test structure, which saves space. By testing the resistance of the semiconductor test structure, it can be judged whether the dual damascene structure has defects. The test method is simple and the test efficiency is high.

Description

technical field [0001] The invention relates to the field of semiconductor manufacturing, in particular to a semiconductor testing structure and a testing method thereof. Background technique [0002] Static random access memory (SRAM), as a member of volatile memory, has the advantages of high speed, low power consumption and compatibility with standard processes, and is widely used in PCs, personal communications, consumer electronics (smart cards, digital cameras, multimedia players ) and other fields. [0003] figure 1 It is a schematic diagram of the circuit structure of the storage unit of the existing 6T structure SRAM memory, the storage unit includes: a first PMOS transistor P1, a second PMOS transistor P2, a first NMOS transistor N1, a second NMOS transistor N2, and a third NMOS transistor N3 and the fourth NMOS transistor N4, the first PMOS transistor P1, the second PMOS transistor P2, the first NMOS transistor N1, and the second NMOS transistor N2 form a bistab...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L23/544H01L21/66
Inventor 白凡飞鲍宇
Owner SEMICON MFG INT (SHANGHAI) CORP
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