Small Aperture Diaphragm Part Capable of Multiple Aperture Variation
A small hole diaphragm and aperture change technology, applied in the direction of optical components, optics, instruments, etc., can solve the problems of inconvenient, difficult to measure, difficult blade design and processing, etc., and achieve the effect of convenient processing and simple structure
Active Publication Date: 2016-02-10
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology
In the exposure system, different imaging requirements correspond to different numerical apertures, and often in an optical system, two or more diaphragms with different apertures are required. The previous design is to process multiple optical apertures with different diameters. After completing a test, it is extremely inconvenient to disassemble and assemble diaphragms with different apertures. Therefore, it is an inevitable requirement to design a mechanical structure that can easily change the size of the diaphragm.
[0003] As mentioned in a variable aperture (patent publication number: 102213891A), through the combination of multiple sets of blade structures, the blades overlap each other to change the size of the aperture. This structure is characterized by a delicate structure , the disadvantage is that the design and processing of the blades are difficult, and it is not easy to measure the small aperture size of the diaphragm with a certain diameter, so as to realize the change of the corresponding aperture
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[0020] The present invention will be further described below in conjunction with the accompanying drawings, but the protection scope of the present invention should not be limited thereby.
[0021] The best embodiment of the present invention is as Figure 1-4 As shown, the present invention can realize the best embodiment of the small hole diaphragm part with multiple diameter changes, including the diaphragm substrate assembly 1, the first strut assembly 2, the second strut assembly 3, the third strut assembly 4, The fourth strut assembly 5.
[0022] The center of the aperture substrate assembly 1 has a reference small hole 1-6, and a first hinge hole 1-7, a second hinge hole 1-8, and a third hinge hole are distributed around the reference aperture 1-6. 1-9, the fourth hinge hole 1-10, the diaphragm substrate assembly 1 passes through the first hinge hole 1-7, the second hinge hole 1-8, the third hinge hole 1-9, and the fourth hinge hole 1-10 respectively It is hinged with...
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A small aperture diaphragm component capable of changing multiple diameters, including a diaphragm substrate assembly and a plurality of strut assemblies, the invention can change the aperture of the small aperture diaphragm by selecting the strut assembly hinged with the aperture substrate assembly , can be conveniently applied to optical design, and the present invention has the characteristics of simple structure and convenient processing.
Description
technical field [0001] The present invention relates to a small hole diaphragm part, in particular to a small hole diaphragm part which can realize multi-aperture variation. Background technique [0002] The diaphragm of the variable aperture of the projection objective lens, the core is to control the size of the aperture (NA). In the exposure system, different imaging requirements correspond to different numerical apertures, and often in an optical system, two or more diaphragms with different apertures are required. The previous design is to process multiple optical apertures with different diameters. After completing a test, it is extremely inconvenient to disassemble and assemble diaphragms with different apertures. Therefore, it is an inevitable requirement to design a mechanical structure that can easily change the size of the diaphragm. [0003] As mentioned in a variable aperture (patent publication number: 102213891A), through the combination of multiple sets of b...
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IPC IPC(8): G02B7/00
Inventor 徐世福王向朝唐锋
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI