Solar silicon wafer and cell defect detection system

Abstract

The invention discloses a solar energy silicon chip and cell sheet defect detection system; a photoinduced fluorescence detection platform is provided with a minority carrier lifetime detector communicating with a processor; an electrogenerated fluorescence detection platform is provided with an electricity charging device capable of applying DC power supply on a sample; the electricity charging device, the sample and the electrogenerated fluorescence detection platform can form a conductive loop; a minority carrier lifetime detection module can emit flashes to the photoinduced fluorescence detection platform; a laser lighting system can emit laser to either the photoinduced fluorescence detection platform or the electrogenerated fluorescence detection platform; an image acquisition system can collect fluoroscopic images emitted by the sample and send the fluoroscopic images to the processor. The equipment can respectively carry out photoinduced fluorescence detection, electrogenerated fluorescence detection, minority carrier lifetime detection and series resistance detection; sample defect detection analysis is comprehensive and accurate, and equipment need not to be repeatedly replaced, operation is convenient, thereby effectively improving work efficiency and saving production cost.

Description

technical field [0001] The invention relates to a solar silicon chip and battery chip detection system, in particular to a solar silicon chip and battery chip defect detection system. Background technique [0002] The photovoltaic industry at home and abroad is developing rapidly, and improving photoelectric conversion efficiency and reducing costs have become the goals of the entire industry. Defects such as black cores, black edges, hidden cracks, diffusion problems, pollution, edge collapse, and minority carrier life in the solar cell production process severely limit the photoelectric conversion efficiency and service life of the cell. Therefore, the solar industry urgently needs related process testing to sort out various defects that affect the photoelectric conversion efficiency and improve the conversion efficiency. As the photovoltaic industry gradually matures, it will rely more and more on testing equipment. The importance of solar cell testing and sorting equip...

AI Technical Summary

Problems solved by technology

[0006] At present, the defect monitoring of solar silicon wafers and cells adopts one of the above methods, which can only analyze some defects that may occur in a certain process stage, and cannot fully reflect the defects of solar silicon wafers and cells. All kinds of testing are carried out separately through their own testing equipment. To carry out more than two kinds of testing, different testing equipment needs to be replaced. The testing efficiency is low and the testing procedures are cumbersome.

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