Scanning Electron Microscope and Detection Method Using Its Primary Electron Current

Abstract

The present invention relates to a scanning electron microscope and a method for detecting currents of primary electrons and secondary electrons using the scanning electron microscope. The scanning electron microscope is characterized in that it includes: a lens barrel with a storage space formed inside; a source arranged inside the lens barrel , used to generate charged primary electrons to the sample outside the lens barrel; a filter, arranged in the lower part of the source inside the lens barrel, is used to change the primary electrons and the primary electrons and The moving path of the secondary electrons emitted after the sample collides; the first detector is arranged inside the lens barrel between the filter and the sample, and is used to detect electrons passing through the filter The amount of current generated by the primary electrons that change the moving path under the action of the electromagnetic field generated in the medium; the second detector is arranged inside the lens barrel between the source and the filter, and is used to detect the amount of current passing through the The filter changes the moving path of the secondary electrons; the filter control unit is configured to control the filter so that the filter selectively changes the moving paths of the primary electrons and the secondary electrons. Thereby, the scanning electron microscope which ensures the efficiency of an inspection operation and the whole size of a device is miniaturized, and the detection method of the primary electron current amount using it are provided.

Description

technical field [0001] The present invention relates to a scanning electron microscope and a method for detecting the amount of primary electron current using it, and in more detail relates to a scanning electron microscope and a method for detecting the amount of original electron current using it: A filter and a first detector that apply an electromagnetic field to the primary electrons and secondary electrons are formed, thereby eliminating the need to install an additional detection device externally, making the device miniaturized, and enabling easy and continuous detection of primary electrons while detecting secondary electrons The amount of current, so as to ensure the efficiency of inspection work. Background technique [0002] The scanning electron microscope (Scanning Electron Microscope, SEM) used in the manufacturing process of semiconductor devices and other processes that require extremely fine and precise inspection and processing guides the electrons generat...

AI Technical Summary

Problems solved by technology

[0009] Therefore, there is a need to set up a detector 4 in addition when analyzing each time, and it is difficult to detect the shortcoming of the current amount of primary electrons in the analysis process, thereby reducing the work efficiency, and because the detector 4 is arranged outside the lens barrel, it has the advantages of the device. Disadvantages of larger overall size

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