Uncooled optical readout infrared focal plane array structure and manufacturing method

Abstract

The invention discloses an uncooled optical readout infrared focal plane array structure and a manufacturing method. The uncooled optical readout infrared focal plane array structure comprises a transparent substrate and a metal reflective plate arranged on the substrate in a suspended mode, and the upper portion of the metal reflective plate is sequentially provided with an infrared absorbing medium layer and a black silicon infrared absorbing reinforcing layer; the left side and the right side of the metal reflective plate are symmetrically provided with multiple cantilevers and isolation beams at intervals, one end of the cantilever on the innermost side is connected with the infrared absorbing medium layer as a whole, the two ends of each isolation beam between the two cantilevers are connected between the two cantilevers respectively as a whole, and one end of the cantilever on the outermost side is bent downward and connected with the transparent substrate to form an anchor claw supporting structure. The uncooled optical readout infrared focal plane array structure is simple in process, can be compatible with later processes, besides, the black silicon medium layer is manufactured on an original infrared absorbing layer of an array detector so that infrared absorbing efficiency can be greatly improved, and accordingly responsivity and sensitivity of devices are greatly improved.

Description

technical field [0001] The invention relates to an uncooled optical readout infrared focal plane array structure and a manufacturing method. Background technique [0002] The infrared absorption efficiency of the uncooled infrared focal plane array based on optical readout is directly related to the signal response level. Therefore, in the current situation of its low infrared response, in order to improve its response signal, many measures have been taken in its infrared absorption. Methods, such as: increasing the area of ​​the absorbing layer, adding a resonant cavity to improve the absorption, etc., but these methods have problems such as conflicting with the size of the device or the difficulty of releasing the sacrificial layer, which makes the effect not obvious and increases the Device fabrication difficulty. Contents of the invention [0003] In order to overcome the above-mentioned defects, the present invention provides an uncooled optical readout infrared foca...

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Problems solved by technology

[0002] The infrared absorption efficiency of the uncooled infrared focal plane array based on optical readout is directly related to the signal response level. Therefore, in the current situation of its low infrared response, in order to improve its response signal, many measures have been taken in its infrared absorption. Methods, such as: increasing the area of ​​the absorbing layer, adding a resonant cavity to improve the absorption, etc., but these methods have problems such as conflicting with the size of the device or the difficulty of releasing the sacrificial layer, which makes the effect not obvious and increases the Device fabrication difficulty

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