Method for growing graphene by controlling graphene nucleation loci on substrate
A nucleation site, graphene technology, applied in graphene, semiconductor/solid-state device manufacturing, electrical components, etc., can solve the problem of uncontrollable graphene nucleation sites, strange shapes, and difficulty in becoming large in size, etc. question
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0018] The present invention controls and prepares graphene nucleation sites on the substrate, and can directly grow a continuous graphene sample with a specific shape on the metal or insulator substrate by low-pressure chemical vapor deposition on the substrate. The method for growing graphene by controlling graphene nucleation sites on the substrate is reliable, the process steps are simple, convenient and reliable, and can be grown on a metal or insulator substrate, and the grown graphene can be controlled. The following is an example of using the graphene nucleation sites on the control substrate to grow graphene proposed by the present invention.
[0019] In the figure, for convenience of description, the structure size and ratio do not represent the actual size.
[0020] First, polish the copper (Cu) substrate or 300nm silicon dioxide (SiO2) 101 substrate to make the surface clean, smooth and flat. Next, clean the substrate sample to remove impurities, particles, residual re...
PUM
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com