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Coating device

A coating device and coating technology are applied to spray devices, devices for applying liquid to surfaces, coatings, etc., to achieve the effects of improved workability, excellent productivity, and low cost

Inactive Publication Date: 2014-07-23
CANON MACHINERY
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, since the up and down movements of the pair of transfer needles are set to be the same, it is not possible to meet such demands.

Method used

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Examples

Experimental program
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Effect test

Embodiment Construction

[0081] figure 1 and figure 2 A coating device according to the present invention is shown, which includes a pair of transfer needles 21 and 22 for coating a paste-like coating agent P on a portion 20 of a workpiece W to be coated. The paste-like coating agent P is a resin adhesive such as epoxy resin or polyimide resin, silver paste, or the like. The transfer needles 21 and 22 are coated with the coating agent P on the front end surface or the front end portion near the front end surface closer to the front end surface.

[0082] The state (position) of the transfer pins 21 and 22 can be displaced by the state displacement unit 25 . Such as Figure 4 As shown, the state shifting unit 25 has: a belt member 26 with the pair of transfer pins 21, 22 attached; a driving mechanism 27 for advancing the belt member 26; controlling the driving mechanism 27 so that the first transfer pin 21 and the second transfer pin 22 are alternately displaced by the control unit 28 in the first...

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PUM

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Abstract

The invention is to provide a coating device, capable of improving productivity, and capable of achieving cost reduction without device enlargement as a whole and a coating method. The coating device of this invention includes a pair of transfer pins 21, 22 for coating a paste-shaped coating medium P on a coated portion 20. By means of a state shift unit 25, the transfer pins 21, 22 are mutually shifted between a first and a second state. In the first state, the first transfer pin 21 is corresponding to the upper side of a coating medium storage portion in which the paste-shaped coating medium P is stored, and the second transfer pin 22 is corresponding to the upper side of the coated portion 20. In the second state, the second transfer pin 22 is corresponding to the upper side of the coating medium storage portion in which the paste-shaped coating medium P is stored, and the first transfer pin 21 is corresponding to the upper side of the coated portion 20. In the first state and the second state, each of the transfer pins 21, 22 is moved in an up-down direction, i.e., a Z axis direction, by means of a Z-axis direction moving unit.

Description

[0001] This application is a divisional application with the application number 201010526259.1, the application date is October 27, 2010, and the invention name is coating device and coating method. technical field [0002] The present invention relates to a coating device and a coating method. Background technique [0003] In semiconductor manufacturing equipment, there is a process of applying paste to lead frames and the like. Therefore, as an application device for applying a paste, conventionally there is an application device using a transfer needle (Patent Document 1 and Patent Document 2). Coating devices using such transfer pins are Figure 10 and Figure 11 Such a coating device. [0004] This coating device includes an XYZ stage 2 arranged on a base 1 , and a transfer needle 3 attached to the XYZ stage 2 . The XYZ table 2 has a first table 6 that reciprocates on the base 1 in the X-axis direction via a linear guide mechanism 5 , and a second table that reciproc...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05C5/00B05C11/10B05B15/08B05B15/68
CPCH01L2924/0002H01L2924/00
Inventor 末田哲也木林茂树林洋志
Owner CANON MACHINERY