Fabrication device and corresponding fabrication method of miniature optical fiber Faber pressure sensor

Abstract

The invention discloses a device for manufacturing a minitype optical fiber Fabry-Perot pressure sensor. The device for manufacturing the minitype optical fiber Fabry-Perot pressure sensor comprises a welding module, a cutting module, a first moving module, a second moving module, an imaging module and a monitoring module. The welding module is used for welding optical fibers to hollow glass tubes. The cutting module is fixedly connected with the welding module and is used for being matched with the imaging module, the first moving module and the second moving module to carry out precise locating and cutting on a diaphragm and the cavity length of a Fabry-Perot cavity. The first moving module and the second moving module are used for driving an object to be processed to move, and assisting the cutting module in carrying out cutting. The imaging module is used for precisely measuring the cutting end face angle of the object to be processed, observing the quality of the Fabry-Perot cavity through collected images, and monitoring the geometric characteristics of the Fabry-Perot cavity. The monitoring module is used for monitoring the quality of the Fabry-Perot cavity in real time, and monitoring the photometric characteristics of the Fabry-Perot cavity. The device for manufacturing the minitype optical fiber Fabry-Perot pressure sensor solves the technical problems that the diaphragm is difficult to connect, the cavity length is hard to control and the diaphragm is thinned in existing Fabry-Perot cavity manufacturing, the manufacturing success rate of the minitype optical fiber Fabry-Perot pressure sensor is improved greatly, and the consistency of manufacture processes is improved.

Description

technical field [0001] The invention relates to the technical field of optical fiber sensors, in particular to a manufacturing device and a corresponding manufacturing method of a miniature optical fiber Fabry pressure sensor. Background technique [0002] With the development of minimally invasive treatment, implantable pressure sensors have become an important tool for monitoring intracranial pressure, intracardiac pressure, blood pressure, etc. Anti-electromagnetic interference and other characteristics have become research hotspots compared to electrical sensors. [0003] In recent years, there have been many reports on medical micro-optical fiber optic F-P pressure sensors, among which the all-fiber micro-Fabry pressure sensor has attracted people's attention, but its production technology has become a major technical difficulty hindering its development. The production steps of the general Fapau pressure sensor include: diaphragm production and connection, precise con...

AI Technical Summary

Problems solved by technology

[0006] An object of the present invention is to provide a device for making a miniature optical fiber Fabry pressure sensor, which can realize the integration of fusion splicing, precise positioning and cutting, and on-line monitoring of Fabry cavity, so as to solve the problems of existing diaphragm acquisition and connection, precise control of cavity length, Manufacturing process problems such as diaphragm thinning, its imaging module and monitoring module enable the sensor to quickly locate the problem when there is a problem in the manufacturing process

[0007] Another object of the present invention is to provide a method for making a miniature optical fiber Fabry pressure sensor using the manufacturing device, so as to solve the existing manufacturing process problems such as diaphragm acquisition and connection, precise control of cavity length, and diaphragm thinning, thereby greatly Increase the operability of sensor making and improve the consistency of sensors

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