Device and method for rapidly detecting optical grating auxiliary gap at high precision

Abstract

The invention relates to a device and method for rapidly detecting an optical grating auxiliary gap at high precision and relates to the field of photoelectric measurement. The problems that an existing non-contact optical method for detecting the optical grating auxiliary gap is low in measurement precision and efficiency, and a structure is large in size are solved. The device comprises a main grating, a carriage, an indicating grating, three electrical vortex sensors, a grating displacement measuring system and a digital display screen, wherein the three electrical vortex sensors are installed below the indicating grating, the grating displacement measuring system is connected with the output ends of the three electrical vortex sensors, and the digital display screen is connected with the output end of the grating displacement measuring system. The three electrical vortex sensors are distributed in the shape of an isosceles triangle with the largest area, three probes of the sensors are located on the same plane, and the plane is flush with the upper surface of the main grating or spaced by a certain distance which is the initial zero position; the periphery of the indicating grating is plated with chromium metal layers equal in width and thickness, the thickness is larger than 0.65 micrometers, and the width of the chromium metal layers is larger than the diameter of the probes. The measurement precision can reach the micrometer level, measurement is rapidly and accurately performed in real time, the structure is simple and small, and distance measuring for glass is achieved.

Description

technical field [0001] The invention relates to the technical field of photoelectric measurement, in particular to a device and method for quickly detecting the sub-gap of a grating with high precision. Background technique [0002] In the field of precision measurement and displacement control, grating rulers are mostly used as measurement methods. Grating rulers are recognized as the most economical and practical technical equipment in high-precision measurement, and are widely used in engineering technology fields involving measurement, such as machine tools and displacement consoles. [0003] The core component of the grating scale is a pair of grating pairs, namely the main grating 3 and the indicator grating 2. A certain gap needs to be maintained between the two to work normally. During the bonding process of the indicator grating 2 and the carriage 1, the structure ensures that the grating pair After bonding, judge whether it meets the requirements by means of detect...

AI Technical Summary

Problems solved by technology

[0006] In order to solve the problems of low measurement accuracy, low efficiency, and large structural size of the existing non-contact optical method for detecting the sub-gap of the grating, the present invention provides a device and method for quickly detecting the sub-gap of the grating with high precision

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