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Continuous operative purification system for trichlorosilane

A purification tower and heating system technology, applied in the field of continuous operation trichlorosilane purification system, can solve the problems of unstable operation of the purification tower group and the like

Active Publication Date: 2014-08-27
CHINA ENFI ENGINEERING CORPORATION
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0008] The present invention aims to provide a continuous operation type trichlorosilane purification system to solve the problem of unstable operation of the purification tower group caused by the existence of non-condensable gas

Method used

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  • Continuous operative purification system for trichlorosilane
  • Continuous operative purification system for trichlorosilane
  • Continuous operative purification system for trichlorosilane

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0050] The 19 kinds of trichlorosilane crude liquids with a pressure of 2.5Mpa and a non-condensable gas content in the range of 0.01 to 0.19wt% from the hydrogenation process were heated to 25°C respectively, and then the crude liquids at 25°C were respectively passed into a 1Mpa In the pressure tank, after opening the exhaust port for exhaust, measure the removal rate of non-condensable gas in the crude liquid, the results are as follows image 3 Shown (the abscissa represents the original mass content of the non-condensable gas in the trichlorosilane crude liquid, and the ordinate is the release rate of the non-condensable gas, and the unit is %):

[0051] When the treated trichlorosilane crude liquid is passed into the purification tower group, the feeding is smooth.

Embodiment 2

[0053] Heat the crude trichlorosilane liquid with a non-condensable gas content of 0.01-0.19wt% from the synthesis process to 70°C, then pass the crude liquid at 70°C into a 1Mpa pressure tank, and open the exhaust port for exhaust After measuring the removal rate of non-condensable gas in the crude liquid, the results are as follows Figure 4 Shown (the abscissa represents the original mass content of the non-condensable gas in the trichlorosilane crude liquid, and the ordinate is the release rate of the non-condensable gas, and the unit is %):

[0054] When the treated trichlorosilane crude liquid is passed into the purification tower group, the feeding is smooth.

Embodiment 3

[0056] Heat the crude trichlorosilane liquid with a non-condensable gas content of 0.01 to 0.19 wt% from the synthesis process to 70°C, then pass the crude liquid at 70°C into a 1.5Mpa pressure tank, and open the exhaust port to discharge After degassing, measure the removal rate of non-condensable gas in the crude liquid, the results are as follows Figure 5 Shown (the abscissa represents the original mass content of the non-condensable gas in the trichlorosilane crude liquid, and the ordinate is the release rate of the non-condensable gas, and the unit is %):

[0057] When the treated trichlorosilane crude liquid is passed into the purification tower group, the feeding is smooth.

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Abstract

The invention discloses a continuous operative purification system for trichlorosilane. The purification system comprises a purification tower group and a degassing device, wherein the degassing device is arranged on the upstream of the purification tower group along the flowing direction of materials and is used for removing noncondensable gas in a crude trichlorosilane solution; the degassing device comprises a heating system and an exhaust tank; the heating system is arranged on the upstream of the purification tower group along the flowing direction of the materials; and the exhaust tank is arranged between the heating system and the purification tower group and is provided with a noncondensable gas exhaust port. The purification system can be used for heating the crude trichlorosilane solution because the upstream of the purification tower group is provided with the heating system, so that the solubility of the noncondensable gas in the crude trichlorosilane solution is reduced, and furthermore, the noncondensable gas in the crude trichlorosilane solution can be favorably separated and exhausted through the exhaust tank. Therefore, the operating pressure fluctuation generated by the noncondensable gas in the purification tower group in the later period is favorably reduced, and the operating stability of the purification tower group is improved.

Description

technical field [0001] The invention relates to the field of polysilicon production, in particular to a continuously operating trichlorosilane purification system. Background technique [0002] Polysilicon is the basic material for manufacturing semiconductor devices, integrated circuits, and solar cell materials. It is the cornerstone of the information and energy industries, and it is also a strategic material that the country encourages and prioritizes development. At present, most of the polysilicon in the world is produced by the improved Siemens method. Among them, the improved Siemens method mainly includes five processes of trichlorosilane synthesis, rectification purification, reduction, tail gas recovery and hydrogenation. Wherein, the main reaction formula of hydrogenation is as follows: [0003] 3SiCl 4 +Si+2H 2 = 4SiHCl 3 [0004] The main reaction formula of trichlorosilane synthesis is as follows: [0005] Si+3HCl=SiHCl 3 +H 2 [0006] In the above i...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/107
Inventor 姜利霞严大洲杨永亮肖荣晖汤传斌
Owner CHINA ENFI ENGINEERING CORPORATION