Composite detection method for large-diameter non-spherical reflector with large deviation in polishing process

A composite detection, aspheric technology, applied in the field of space optics, can solve problems such as missing interference fringes

Inactive Publication Date: 2014-08-27
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0006] In order to solve the problem of local lack of interference fringes in the large-aperture large-deviation aspheric mirror in the existing zero com...

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  • Composite detection method for large-diameter non-spherical reflector with large deviation in polishing process
  • Composite detection method for large-diameter non-spherical reflector with large deviation in polishing process
  • Composite detection method for large-diameter non-spherical reflector with large deviation in polishing process

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Embodiment Construction

[0039] The present invention will be described in further detail below in conjunction with the accompanying drawings.

[0040] The method of the invention is carried out in the process of polishing the aspheric mirror after grinding.

[0041] Using computer-controlled small grinding head technology (CCOS) to perform deterministic processing of large-diameter and large-offset aspheric surfaces, during which the surface shape is measured by a profiler or a three-coordinate measuring instrument, and the PV value of the surface shape is obtained after detection. When the (Peak to valley value) is better than 3 μm, polish it.

[0042] Such as figure 2 As shown, the compound detection method in the polishing process of the large-caliber large-deviation aspheric mirror of the present invention comprises the following steps:

[0043] 1. Design and make optical compensator

[0044] Design and manufacture the optical compensator 6 according to the optical parameters (vertex curvatur...

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Abstract

The invention provides a composite detection method for a large-diameter non-spherical reflector with large deviation in a polishing process, and belongs to the technical field of space optics. The composite detection method solves the problem that in an existing zero compensation detection technology, part of interference fringes of a large-diameter non-spherical reflector with large deviation are lost. The method includes the first step of designing and manufacturing an optical compensator, the second step of setting up and calibrating an interference zero compensation detection optical path, the third step of establishing and adjusting a hartmann-splicing detection optical path, the fourth step of carrying out hartmann-splicing detection, the fifth step of conducting non-spherical multicycle processing and hartmann-splicing detection, the sixth step of carrying out combined detection and analysis and the seventh step of conducting non-spherical multicycle processing and combined detection. The method overcomes a difficulty of surface shape missing at an interference detection stage of the large-diameter non-spherical reflector with large deviation, and a zero compensation method and a hartmann-splicing detection method can be mutually contrasted and verified at a finishing polish stage finally so that accuracy and reliability of detection can be guaranteed.

Description

technical field [0001] The invention relates to a compound detection method in the polishing process of a large-diameter and large-deviation aspheric mirror, which belongs to the field of space optics technology. Background technique [0002] Using aspherical optical components in the optical system can not only reduce the complexity of the system, but also greatly improve the system performance. Therefore, aspheric optical elements are the core components of military and civilian high-performance optical systems. The field of optoelectronic instruments has a wide range of applications. [0003] Especially in the field of space optics, because the off-axis triple anti-astigmatism aspheric optical system (TMA) has excellent characteristics such as fewer groups, large field of view, long focal length, wide band, high modulation transfer function, and strong ability to suppress stray light, etc., The large-aperture aspheric element has been widely used in space remote sensing...

Claims

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Application Information

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IPC IPC(8): G01B11/24
Inventor 王孝坤
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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