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Micro component comprehensive mechanical property test device

A technology of comprehensive mechanics and testing equipment, which is applied in the direction of measuring equipment, using stable tension/compression to test the strength of materials, scientific instruments, etc., can solve the problem that testing methods and equipment are no longer applicable, the structure of testing equipment is complicated, and the dispersion of test data Large and other problems, to achieve the effect of reliable support, accurate measurement, and easy installation and debugging

Active Publication Date: 2014-08-27
HARBIN INST OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] However, due to the small size of the sample, whether in static testing or dynamic testing, a series of technical difficulties such as the alignment of micro-components, clamping, micro-displacement driving, and measurement of micro-loads and micro-displacements make traditional testing methods and devices difficult. no longer applicable
At present, there is no uniform standard for testing devices, and most of the testing devices have complex structures, the required instruments are very expensive, and the test data is highly dispersed.
How to minimize test errors, ensure accurate and consistent test results, improve test efficiency, and enable test data to be processed quickly for feedback monitoring or directly applied to production practice, these problems are difficulties that need to be overcome urgently for researchers is also a challenge

Method used

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  • Micro component comprehensive mechanical property test device

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specific Embodiment approach 1

[0019] Specific implementation mode one: as figure 2 , Figure 7 As shown, the micro-component comprehensive mechanical performance testing device includes an in-situ observation system 1, a micro-tensile testing system 2, an auxiliary mechanical system 3 and a dynamic testing system 4; the mechanical auxiliary system 3 includes an X-Y two-dimensional motion platform, Marble vibration isolation platform 3-3, marble beam 3-5 and two marble columns 3-4, the described X-Y two-dimensional motion platform is arranged on the marble vibration isolation platform 3-3, and the Y direction of the X-Y two-dimensional motion platform The motion platform 3-1 is set on the X-direction motion platform 3-2, the micro-tensile testing system 2 is installed on the Y-direction motion platform 3-1, and the dynamic test system 4 is installed on the marble beam 3-5 On the front side, the two ends of the marble beam 3-5 are respectively supported by one of the marble columns 3-4, and the lower ends ...

specific Embodiment approach 2

[0020] Specific implementation mode two: as figure 2 , image 3 and Figure 5 As shown in the specific embodiment 1, the micro-component comprehensive mechanical performance testing device, the micro-tensile testing system 2 includes a horizontal precision drive unit 2-1, a micro force sensor 2-2, and a horizontal linear grating measuring device 2-3 , horizontal high-precision electric shift table 2-4, horizontal object stage 2-5, force sensor fixed block 2-6, two fixing parts 2-7, described horizontal high-precision electric shift table 2-4 includes left load Object platform 2-4-1, right loading platform 2-4-2, lead screw nut pair 2-4-3, L-shaped base 2-4-4, support seat 2-4-5, stepping motor 2- 4-6, four left sliders 2-4-7, four right sliders 2-4-8, two guide rails 2-4-9, the horizontal stage 2-5 includes an animal stage 2-5-1 and the static stage 2-5-2, the horizontal linear grating measuring device 2-3 includes the grating ruler reading head installation frame 2-3-1, t...

specific Embodiment approach 3

[0022] Specific implementation mode three: as image 3 , Figure 4 As shown, in the micro-component comprehensive mechanical performance testing device described in Embodiment 2, the horizontal precision drive unit 2-1 includes a first flexible hinge mechanism 2-1-1, a first pre-tightening screw 2-1-2 , the first piezoelectric ceramic 2-1-3, two first gaskets 2-1-4, two steel balls 2-1-5, three first mounting holes 2-1-6, the first The middle part of the flexible hinge mechanism 2-1-1 is provided with a first groove, and the first piezoelectric ceramic 2-1-3 is arranged in the first groove of the first flexible hinge mechanism 2-1-1, and the first The two ends of the piezoelectric ceramic 2-1-3 contact the inner wall of the first groove of the first flexible hinge mechanism 2-1-1 respectively through the steel ball 2-1-5 and the first gasket 2-1-4, and the first The flexible hinge mechanism 2-1-1 is provided with three first installation holes 2-1-6 for fixed connection with...

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Abstract

The invention discloses a micro component comprehensive mechanical property test device, and relates to a micro component mechanical property test device. By means of the device, measurement of mechanical property static parameters of micrometer-scale components and exploration of the fatigue characteristic can be achieved. An X-Y two-dimensional movement platform is arranged on a marble vibration isolation platform, and a Y-direction movement platform of the X-Y two-dimensional movement platform is arranged on an X-direction movement platform. A micro tensile test system is installed on the Y-direction movement platform. A dynamic test system is installed on the front side face of a marble beam. The two ends of the marble beam are supported through marble stand columns respectively. The lower ends of the two marble stand columns are fixed to the upper surface of the marble vibration isolation platform. An in-situ observation system is installed on a vertical high-precision electric movement platform of the dynamic test system. The micro component comprehensive mechanical property test device is used for the micro component comprehensive mechanical property test.

Description

technical field [0001] The invention relates to a device for testing the mechanical properties of micro components. Background technique [0002] The highly elastic alloy micro-components of the inertial navigation system are easily fractured and failed in the ground loading test, and the characteristic size of the micro-components in the inertial sensor is roughly in the range of submicron to millimeter. When it is micron / nanoscale, due to the size effect, the physical properties of the micro-component material itself and the degree to which it is affected by the environment will change greatly, and its mechanical properties and the relative relationship between the body force and surface force will also change. Significant changes will occur. The mechanical performance parameters of materials under macroscopic conditions are far from meeting the design requirements of the MEMS system structure, and a series of technical problems brought about by tiny test pieces make trad...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01N3/08G01N3/02
Inventor 车琳王波李国丁飞王石磊
Owner HARBIN INST OF TECH
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