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Even supporting device for optical element surface shape detection

An optical element and support device technology, which is applied in the field of uniform support device for optical element surface shape detection, can solve the problems of low precision of detection plate tooling and poor fit of the measured surface of optical elements, etc., so as to reduce astigmatism and ensure high precision Effect

Active Publication Date: 2014-09-17
BEIJING GUOWANG OPTICAL TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to solve the technical problems of low detection accuracy of flat tooling, poor fit with the measured surface of the optical element, and introduction of large support astigmatism in the existing optical element surface shape inspection process, and to provide a surface shape inspection method for optical elements. uniform support device

Method used

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  • Even supporting device for optical element surface shape detection
  • Even supporting device for optical element surface shape detection
  • Even supporting device for optical element surface shape detection

Examples

Experimental program
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Effect test

Embodiment approach 1

[0027] The uniform support device for the surface shape detection of the optical element also includes a fluid rubber sleeve 7. The size of the fluid rubber sleeve 7 matches the cavity and is set in the cavity, and can realize airtightness. It is generally a circular rubber tube with a square cross section, and a movable ball head The end surface of the piston 2-2 of the piston support 2 is in contact with the top surface of the fluid rubber sleeve 7, and the fluid rubber sleeve cavity 7-1 of the fluid rubber sleeve 7 can be flushed or discharged with fluid, and the pressure of the fluid is transmitted through the fluid rubber sleeve 7 Give the piston 2-2, and then promote the movable ball head piston support 2 to move axially. The fluid rubber sleeve 7 can also be provided with second fluid inlets and outlets 7-2A and 7-2B respectively matched with the first fluid inlets and outlets 1A and 1B, and the fluid rushes into the fluid rubber sleeve through the second fluid inlets an...

Embodiment approach 2

[0029] The housing 4 and the base 5 of the optical element surface type detection uniform support device directly form a closed cavity through the fastening screw 6, and the fluid is directly filled into the cavity, and the fluid is directly connected to the end surface of the piston 2-2 of the movable ball head piston support 2 Contact, the side of the piston 2-2 is provided with a sealing ring 2-3, relying on the sealing ring 2-3 to seal the fluid.

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Abstract

The invention discloses an even supporting device for optical element surface shape detection, and belongs to the field of optical element surface shape detection. The even supporting device comprises movable ball head piston supports, linear bearings, a shell and a base. The shell is fixedly arranged on the base, a cavity is formed by the shell and the base, a plurality of mounting holes which are communicated with the cavity and are evenly distributed along the circumference are formed in the shell, and the inner wall of each mounting hole is provided with one linear bearing and contains one movable ball head piston support. The movable ball head piston supports comprise support bodies, round balls and pistons. The movable ball head piston supports are limited by the linear bearings to move in the axial direction. Fluid exists in the cavity and is in a sealed state, the fluid pushes the pistons through pressure, the movable ball head piston supports are made to move in the axial direction, and supporting force on an optical element is provided. The device is suitable for the surface shape needs for plane, sphere and non-sphere optical elements, astigmatism induced by a detection tool is greatly reduced, and high precision of optical element surface shape detection is guaranteed.

Description

technical field [0001] The invention belongs to the field of optical element surface shape detection, in particular to a uniform support device for optical element surface shape detection. Background technique [0002] Projection lithography equipment is the key equipment in the manufacturing process of large-scale integrated circuits. In recent years, with the continuous improvement of the fineness of the line width of integrated circuits, the resolution of projection optical equipment has gradually improved. At present, the ArF excimer laser with a wavelength of 193.368nm Lithography equipment has become the mainstream equipment for integrated circuit manufacturing at 90nm, 65nm and 45nm nodes. In order to meet the requirements of the projection lithography objective lens system, the surface accuracy of the optical components of the projection lithography objective lens is at the nanometer or even sub-nanometer level. The surface inspection of high-precision optical compo...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20
Inventor 李显凌陈华男倪明阳彭海峰
Owner BEIJING GUOWANG OPTICAL TECH CO LTD