Self-assembled structures, method of manufacture thereof and articles comprising the same
A technology of composition and grafted polymer, which is applied in the photoplate making process of patterned surface, photosensitive materials used in optomechanical equipment, instruments, etc., and can solve the problems of light intensity modulation loss and so on
Inactive Publication Date: 2014-09-17
ROHM & HAAS ELECTRONIC MATERIALS LLC +1
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Abstract
The invention discloses a composition comprising grafted block copolymer, a photo-acid generator, and a crosslinking agent. The grafted block copolymer comprises first block polymer and second block polymer; wherein the first block polymer comprises main chain polymer and first grafted polymer, the first grafted polymer comprises a part with reduced surface energy, the second block polymer is connected to the first block polymer through a covalent bond, the second bock polymer comprises main chain polymer and second grafted polymer, and the second grafted polymer comprises an functional group effective on the crosslinked grafted block polymer.
Application Domain
Photosensitive material processingPhotosensitive materials for photomechanical apparatus
Technology Topic
Surface energyCovalent bond +3
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PUM
Property | Measurement | Unit |
Glass transition temperature | 130.0 | °C |
Thickness | 18.0 ~ 25.0 | nm |
Roughness | <= 0.2 | nm |
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