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An objective lens protection window with a radial pull-out structure

A pull-out and window technology, which is applied in the field of protection of the internal optical system of the lithographic projection objective lens, can solve the problems of inconvenient maintenance and low repeat positioning accuracy, and achieve the effects of easy maintenance and replacement, elimination of surface degradation, and realization of tilt errors

Inactive Publication Date: 2016-01-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The purpose of the present invention is to propose an objective lens protection window with a radial pull-out structure, which solves the problems of inconvenient maintenance and low repeat positioning accuracy existing in the prior art, and avoids surface damage caused by heat absorption of the window optical lens in the objective optical system. shape change

Method used

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  • An objective lens protection window with a radial pull-out structure
  • An objective lens protection window with a radial pull-out structure
  • An objective lens protection window with a radial pull-out structure

Examples

Experimental program
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Effect test

Embodiment 1

[0028] See attached figure 1 , attached figure 2 And attached image 3 , an objective lens protection window with a radial pull-out structure of the present invention includes a fixed assembly 1, a mirror frame assembly 3 and a lens barrel assembly 3;

[0029] The picture frame assembly 3 includes a V-shaped clamping block 2-1, a window frame 2-2 and a window glass 2-3; the inside of the window frame 2-2 is provided with a plurality of V-shaped structures, and the V-shaped clamping block 2-1 is fixed on the window frame 2-2 by screws, the multiple V-shaped structures and the V-shaped clamping blocks 2-1 are evenly distributed on the circumference, and the window lens 2-3 is fixed by multiple V-shaped structures and The V-shaped clamping block 2-1 is fixed on the window frame 2-2;

[0030] The lens barrel assembly 3 includes a window lens barrel 3-3, the lens frame assembly 3 is fixed on the lens barrel assembly 3 through the fixing assembly 1, and the lens frame assembly 3...

Embodiment 2

[0040] See attached Figure 7 The difference between this embodiment and Embodiment 1 is that: the frame assembly 3 can be drawn radially along the window barrel 3-3, specifically: the frame assembly 3 also includes two sliders, and the two sliders The block is arranged on the outside of the window frame 2-2 and is symmetrical to the V-shaped clamping block 2-1, and the inside of the window barrel 3-3 is oppositely provided with two sliding grooves, and the two sliding blocks are respectively connected to the two sliding blocks. Groove fit.

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Abstract

The invention provides an objective lens protection window of a radial drawing type structure, belongs to the field of protection of an inner optical system of a photoetching projection objective lens, and aims to solve the problems in the prior art that the maintenance is not convenient and the repeated positioning accuracy is low, and avoid surface shape changes caused by heat absorption of a window optical lens in an objective lens optical system. The objective lens protection window comprises a fixed assembly, a lens frame assembly and a lens cone assembly, wherein the lens cone assembly comprises a V-shaped clamping block, a window lens frame and a window lens; the inner side of the window lens frame is provided with a plurality of V-shaped structures; the V-shaped clamping block is fixedly arranged on the window lens frame by a screw; the plurality of V-shaped structures and the V-shaped clamping block are uniformly distributed at the periphery; the window lens is fixedly arranged on the window lens frame by the plurality of V-shaped structures and the V-shaped clamping block; the lens cone assembly comprises a window lens cone; the lens frame assembly is fixedly arranged on the lens cone assembly through the fixed assembly; the lens frame assembly can be drawn along the radial direction of the window lens cone; the window lens, the window lens frame and the window lens cone are coaxially mounted.

Description

technical field [0001] The invention belongs to the field of protection of the internal optical system of a lithography projection objective lens, and in particular relates to an objective lens protection window with a radial pull-out structure that can be used in a lithography projection objective lens system. Background technique [0002] Projection lithography machine is the most critical equipment in semiconductor chip manufacturing, and it is also the most precise, difficult and technology-intensive equipment in the semiconductor industry. As the most critical core component of projection lithography machine, lithography projection objective lens, its performance determines the overall Machine technical indicators. Therefore, the protection of lithography projection objective lens is very necessary. [0003] During the exposure process of the projection lithography machine, the photoresist on the silicon wafer will produce volatile substances and dust particles in the ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G03F7/20
Inventor 华洋洋倪明阳李显凌杨怀江隋永新
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI