Dual-longitudinal-mode-laser-device interlocking method and device based on piezoelectric effect and acousto-optic frequency shift

Abstract

The invention provides a dual-longitudinal-mode-laser-device interlocking method and device based on a piezoelectric effect and an acousto-optic frequency shift, and belongs to the technical field of laser application. The output laser frequencies of a plurality of dual-longitudinal-mode laser devices based on cavity length piezoelectric adjustment are locked into the output laser frequency of the same reference dual-longitudinal-mode frequency-stabilized laser device according to the acousto-optic frequency shift technology, so that lasers output by the laser devices have a unified frequency value. The defect that traditional frequency-stabilized laser devices have low frequency consistency is overcome, and a novel laser source is provided for ultra-precise laser interferometry.

Description

technical field [0001] The invention belongs to the technical field of laser applications, in particular to a method and device for interlocking dual longitudinal mode lasers based on piezoelectric effect and acousto-optic frequency shifting. Background technique [0002] In recent years, ultra-precision measurement and processing technologies represented by lithography machines and CNC machine tools have developed towards large-scale, high-precision, multi-space degrees of freedom simultaneous measurement, and the total laser power consumption of the laser interferometry system has increased sharply. The output laser power exceeds the output laser power of a single frequency-stabilized laser, so it is necessary to use multiple frequency-stabilized lasers for combined measurement at the same time. However, there are differences in the relative frequency stability, laser wavelength value, and wavelength drift direction of different frequency-stabilized lasers, which will brin...

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Problems solved by technology

[0003] The frequency-stabilized laser sources currently used in laser interferometry systems mainly include dual-longitudinal-mode frequency-stabilized lasers, transverse Zeeman frequency-stabilized lasers, and longitudinal Zeeman lasers. The center frequency of the laser gain curve is used as the frequency stabilization reference for such lasers. The reference frequency of frequency stabilization control, while the center frequency of the laser gain curve changes with the working gas pressure and discharge conditions, and the physical parameters of multiple frequency stabilization lasers cannot be highly consistent, so there are differences in the reference frequency of frequency stabilization control , resulting in low frequency consistency of laser output from multiple frequency-stabilized lasers, which can only reach 10 -6 ~10 -7

[0004] In order to solve the problem of poor frequency consistency between frequency-stabilized lasers, Harbin Institute of Technology proposed a dual longitudinal mode laser bias frequency locking method (Chinese Patent Application Nos. The output laser frequency of the frequency-stabilized laser or the dual longitudinal mode laser is used as a reference, and the remaining multiple dual longitudinal mode lasers are locked by a certain value relative to the reference frequency, so that the output lasers of multiple dual longitudinal mode lasers have the same wavelength ( frequency), but this method needs to adjust the internal working parameters of the laser during the laser frequency locking process. On the one hand, because the adjustment method is an indirect adjustment, the response speed of the system is relatively slow. On the other hand, due to the characteristic parameters of each laser There are certain differences, and changes in the internal working parameters of the laser may have a negative impact on the frequency stability of the laser, and in severe cases it may even cause the laser to lose lock

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