Polycrystalline silicon rod carrying tool, and polycrystalline silicon rod retrieval method
A technology of polysilicon rods and fixtures, applied in chemical instruments and methods, silicon, silicon compounds, etc., can solve problems such as difficulties, collapses, and dangers
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[0039] Hereinafter, modes for implementing the present invention will be described with reference to the drawings.
[0040] figure 1 It is a cross-sectional schematic explanatory diagram showing an example of the structure of the reaction furnace 100 when producing polycrystalline silicon rods according to the present invention. The reaction furnace 100 is a device for obtaining polycrystalline silicon rods 11 by vapor-phase-growing polycrystalline silicon on the surface of a silicon core wire 12 by the Siemens method, and is composed of a substrate 5 and a bell jar 1 .
[0041] Arranged on the substrate 5 are: a metal electrode 10 for supplying current to the silicon core wire 12; a gas nozzle 9 for supplying process gases such as nitrogen, hydrogen, and trichlorosilane gas; and a reaction waste gas outlet 8 for discharging waste gas.
[0042] The bell jar 1 is provided with a refrigerant inlet 3 and a refrigerant outlet 4 for cooling the bell jar 1 , and a viewing window 2 ...
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