Polycrystalline silicon rod carrying tool, and polycrystalline silicon rod retrieval method

A technology of polysilicon rods and fixtures, applied in chemical instruments and methods, silicon, silicon compounds, etc., can solve problems such as difficulties, collapses, and dangers

Inactive Publication Date: 2014-09-24
SHIN ETSU CHEM IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

A polysilicon rod of this size weighs more than 400kg in a torii-shaped state, and after the reaction is completed, there are many cracks on the polysilicon rod, and there is a risk of collapse. Therefore, it is necessary to remove it from the reaction furnace after the reaction (getting homework) difficult and dangerous

Method used

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  • Polycrystalline silicon rod carrying tool, and polycrystalline silicon rod retrieval method
  • Polycrystalline silicon rod carrying tool, and polycrystalline silicon rod retrieval method
  • Polycrystalline silicon rod carrying tool, and polycrystalline silicon rod retrieval method

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Embodiment Construction

[0039] Hereinafter, modes for implementing the present invention will be described with reference to the drawings.

[0040] figure 1 It is a cross-sectional schematic explanatory diagram showing an example of the structure of the reaction furnace 100 when producing polycrystalline silicon rods according to the present invention. The reaction furnace 100 is a device for obtaining polycrystalline silicon rods 11 by vapor-phase-growing polycrystalline silicon on the surface of a silicon core wire 12 by the Siemens method, and is composed of a substrate 5 and a bell jar 1 .

[0041] Arranged on the substrate 5 are: a metal electrode 10 for supplying current to the silicon core wire 12; a gas nozzle 9 for supplying process gases such as nitrogen, hydrogen, and trichlorosilane gas; and a reaction waste gas outlet 8 for discharging waste gas.

[0042] The bell jar 1 is provided with a refrigerant inlet 3 and a refrigerant outlet 4 for cooling the bell jar 1 , and a viewing window 2 ...

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Abstract

Air bags (220A, 220B) are provided respectively to two mutually opposing planar surfaces of an inner peripheral surface of a cylindrical member (210). When retrieving a polycrystalline silicon rod (11), the cylindrical member (210) of a carrying tool (200) covers the polycrystalline silicon rod (11) (pair) from above to accommodate the polycrystalline silicon rod (11) therein, and when gas is injected into the air bags (220) to inflate the air bags (220), the air bags (220) press against the side surfaces of the polycrystalline silicon rod (11) from the direction orthogonal to the planar surfaces including both gateway-shaped pillar members, and hold the polycrystalline silicon rod (11) in the cylindrical member (210). As a result, collapsing of the polycrystalline silicon rod (11) is avoided, even if cracks have formed in the polycrystalline silicon rod (11), as external impacts are absorbed by the air bags (220).

Description

technical field [0001] The present invention relates to a jig used when carrying out a polycrystalline silicon rod manufactured by the Siemens method to the outside of a reaction furnace, and a method for obtaining a polycrystalline silicon rod using the jig. Background technique [0002] Polycrystalline silicon is a raw material for monocrystalline silicon substrates for semiconductor device manufacturing and silicon substrates for solar cell manufacturing. In general, polysilicon is produced by the Siemens method in which raw material gas containing chlorosilane is brought into contact with a heated silicon core wire, and polysilicon is decomposed by a chemical vapor phase reaction method (CVD: Chemical Vapor Deposition). Deposited on the surface of the silicon core wire. [0003] When polysilicon is grown by the Siemens method, two silicon core wires in the vertical direction and one silicon core wire in the horizontal direction are assembled into a torii shape in the re...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C01B33/035C01B33/02
CPCC01B33/035B66C3/02B66F11/00
Inventor 黑泽靖志祢津茂义
Owner SHIN ETSU CHEM IND CO LTD
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