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Magnetic sensing device and sensing method and preparation technology thereof

A preparation process and magnetic sensing technology, which are applied in the manufacture/processing of electromagnetic devices, measurement devices, and resistors controlled by magnetic fields, etc., can solve the problem of inability to manufacture triaxial sensors at the same time, and achieve obvious price competitiveness and excellent The effect of performance, good manufacturability

Active Publication Date: 2014-11-19
QST CORP
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  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the simultaneous fabrication of three-axis sensors cannot be realized on a single wafer / chip

Method used

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  • Magnetic sensing device and sensing method and preparation technology thereof
  • Magnetic sensing device and sensing method and preparation technology thereof
  • Magnetic sensing device and sensing method and preparation technology thereof

Examples

Experimental program
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Embodiment 1

[0065] see Figure 6 , Figure 7 , the present invention discloses a magnetic sensing device, the magnetic material is perpendicular to the surface of the substrate (the angle between the substrate and the substrate is not strictly 90 degrees, which can be between 60 degrees and 90 degrees), so the Z-axis can be sensed direction, the magnetic sensing device includes: a substrate 100, a first electrode layer, a groove 130, a magnetic material layer 120, connection vias, connection wires, a pressurization module, and a magnetic field measurement module.

[0066] The first electrode layer is disposed on the substrate 100, including n first electrodes, where n is an integer; the first electrode layer is the electrode E1 in turn. 0 , Electrode E1 1 , Electrode E1 2 , ..., electrode E1 n-1 . In this embodiment, n=3, and the first electrode layer includes first electrodes 101 , 102 , and 103 arranged at equal intervals; of course, the distance between adjacent first electrodes m...

Embodiment 2

[0087] see Figure 15 , Figure 16 The difference between this embodiment and Embodiment 1 is that, in this embodiment, the magnetic material layer is deposited on both sides of the one trench.

[0088] The advantage of this embodiment is that both sides of the trench are used, which improves the efficiency of the substrate, increases the density of the device, and is beneficial to reduce the cost per unit area.

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Abstract

The invention discloses a magnetic sensing device and a sensing method and preparation technology thereof. The magnetic sensing device comprises a substrate, a first electrode layer, grooves, a magnetic material layer, connecting through holes, a pressurization module, a magnetic field measuring module and a SET / RESET module, wherein the first electrode layer is arranged on the substrate, a second electrode layer is arranged on the magnetic material layer, the magnetic material layer is deposited at the side surfaces of the grooves, the bottom of the magnetic material layer is connected with the first electrode layer, the connecting through holes are used to connect electrodes E1i with electrodes E2i in a shorted manner so that the potentials of the electrodes E1i and E2i are the same, the pressurization module is used to pressurize electrodes E10 and E2n, and the magnetic field measuring module is used to measure the intensity and direction of a peripheral magnetic field. According to the magnetic sensing device, a single wafer / chip simultaneously includes sensing units in the X, Y and Z axial directions, the manufacturability is excellent, the performance is high, and the price competitiveness is obvious.

Description

technical field [0001] The invention belongs to the field of semiconductor technology, and relates to a magnetic sensing device, in particular to a Z-axis magnetic sensing device; Fabrication process of Z-axis magnetic sensing device. Background technique [0002] According to its principle, magnetic sensors can be divided into the following categories: Hall elements, magneto-sensitive diodes, anisotropic magnetoresistance elements (AMR), tunnel junction magnetoresistance (TMR) elements and giant magnetoresistance (GMR) elements, induction coils , superconducting quantum interference magnetometer, etc. [0003] Electronic compass is one of the important application fields of magnetic sensors. With the rapid development of consumer electronics in recent years, in addition to navigation systems, more and more smart phones and tablet computers have also begun to be equipped with electronic compass as standard, bringing users In recent years, the demand for magnetic sensors ha...

Claims

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Application Information

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IPC IPC(8): G01R33/09H01L43/08H01L43/12
Inventor 万旭东万虹张挺
Owner QST CORP
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