Magnetic sensing device and sensing method and preparation technology thereof
A preparation process and magnetic sensing technology, which are applied in the manufacture/processing of electromagnetic devices, measurement devices, and resistors controlled by magnetic fields, etc., can solve the problem of inability to manufacture triaxial sensors at the same time, and achieve obvious price competitiveness and excellent The effect of performance, good manufacturability
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[0064] Example one
[0065] See Image 6 , Figure 7 The present invention discloses a magnetic sensor device, the magnetic material is perpendicular to the surface of the substrate (the angle between the magnetic material and the substrate is not strictly 90 degrees, which can be between 60 degrees and 90 degrees), so the Z axis can be sensed Directional magnetic field, the magnetic sensing device includes: a substrate 100, a first electrode layer, a groove 130, a magnetic material layer 120, a connection through hole, a connection line, a pressure module, and a magnetic field measurement module.
[0066] The first electrode layer is disposed on the substrate 100 and includes n first electrodes, where n is an integer; the first electrode layer in turn is the electrode E1 0 , Electrode E1 1 , Electrode E1 2 ,..., electrode E1 n-1 . In this embodiment, n=3, and the first electrode layer includes first electrodes 101, 102, 103 arranged at equal intervals; of course, the distance betw...
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[0086] Example two
[0087] See Figure 15 , Figure 16 The difference between this embodiment and the first embodiment is that, in this embodiment, the magnetic material layer is deposited on the two sides of the one trench.
[0088] The advantage of this embodiment is that both sides of the trench are used, the use efficiency of the substrate is improved, the density of the device is increased, and the cost per unit area is reduced.
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