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Magnetic sensing device and manufacturing technology thereof

A preparation process and magnetic sensing technology, applied in the field of magnetic sensing, can solve the problems of inability to manufacture triaxial sensors at the same time, poor sensitivity, complex triaxial magnetic sensor preparation process, etc., to achieve obvious price competitiveness and improve sensitivity , the effect of good manufacturability

Active Publication Date: 2015-02-25
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the simultaneous fabrication of three-axis sensors cannot be realized on a single wafer / chip
[0009] In addition, the preparation process of the three-axis magnetic sensor is complicated; and the Z-axis magnetic material film is thin and the sensitivity is not good.

Method used

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  • Magnetic sensing device and manufacturing technology thereof
  • Magnetic sensing device and manufacturing technology thereof
  • Magnetic sensing device and manufacturing technology thereof

Examples

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Embodiment 1

[0056] see Figure 9 , Figure 10 , the present invention discloses a magnetic sensing device, the device includes a vertical direction (as the third direction, of course, it can also be other third directions) magnetic sensing components, the vertical direction magnetic sensing components include: a substrate, a first A dielectric layer 10 , a second dielectric layer 20 , a magnetic conduction unit 31 , an induction unit 32 , and protective material layers 41 and 42 . Of course, the second dielectric layer 20 may not be provided, and the sensing unit 32 may be provided directly on the first dielectric layer 10; the first dielectric layer 10 and the second dielectric layer 20 may also be regarded as a part of the substrate.

[0057] The first dielectric layer 10 is arranged on the surface of the substrate, and groove groups are arranged on it, and one group of groove groups includes a plurality of grooves 11 arranged in parallel (such as Figure 9 As shown, a set of groove g...

Embodiment 2

[0074] In this embodiment, the magnetic sensing device includes a third directional magnetic sensing component, and the third directional magnetic sensing component includes: a substrate, a magnetic conduction unit, and an induction unit.

[0075] Groove groups are formed on the surface of the base, and a group of groove groups includes several parallel grooves. Part of the magnetic conduction unit is arranged in several grooves of the groove group, and part of the groove is exposed to the surface of the substrate, and the magnetic conduction units arranged in adjacent grooves in a groove group are connected; the magnetic conduction unit is used The magnetic signal in the third direction is sensed, and the magnetic signal is output to the sensing unit for measurement. The induction unit is arranged on one side of the corresponding groove group, and there is a gap between the magnetic conduction unit; the induction unit measures the magnetic field in the first direction or / and ...

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Abstract

The invention discloses a magnetic sensing device and a manufacturing technology of the magnetic sensing device. The magnetic sensing device includes a third-direction magnetic sensing component. The third-direction magnetic sensing component comprises a substrate, magnetic conduction units and sensing units; trench groups are formed in the surface of the substrate, and each trench group comprises a plurality of trenches arranged in parallel; the magnetic conduction units are partially arranged in the trenches of each trench group and partially exposed out of trenches to the surface of the substrate, and the magnetic conduction units of the adjacent trenches in each trench group are connected; the magnetic conduction units are used for sensing magnetic signals in the third direction and outputting the magnetic signals to the sensing units for measurement; each sensing unit is arranged on one side of the corresponding trench group; the sensing units measure a first-direction magnetic field or / and a second-direction magnetic field and can measure a third-direction magnetic field which is conducted to the first direction or / and the second direction by combining the magnetic signals output by the magnetic conduction units, wherein the first direction, the second direction and the third direction are perpendicular to one another in pairs. According to the manufacturing technology, the sensitivity of the magnetic sensing device can be improved.

Description

technical field [0001] The invention belongs to the technical field of magnetic sensing, and relates to a sensor, in particular to a magnetic sensing device; meanwhile, the invention also relates to a preparation process of the magnetic sensing device. Background technique [0002] According to its principle, magnetic sensors can be divided into the following categories: Hall elements, magneto-sensitive diodes, anisotropic magnetoresistance elements (AMR), tunnel junction magnetoresistance (TMR) elements and giant magnetoresistance (GMR) elements, induction coils , superconducting quantum interference magnetometer, etc. [0003] Electronic compass is one of the important application fields of magnetic sensors. With the rapid development of consumer electronics in recent years, in addition to navigation systems, more and more smart phones and tablet computers have also begun to be equipped with electronic compass as standard, bringing users In recent years, the demand for ma...

Claims

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Application Information

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IPC IPC(8): G01R33/02H01L43/08H01L43/12
Inventor 杨鹤俊张挺
Owner QST CORP
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