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Magnetic sensing device, and magnetic sensing method and manufacturing technology thereof

A magnetic sensing and magnetic sensor technology, applied in the field of electronic communication, can solve the problems that the three-axis sensor cannot be manufactured at the same time, and achieve the effect of obvious price competitiveness, excellent performance and good manufacturability

Inactive Publication Date: 2014-06-25
QST CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the simultaneous fabrication of three-axis sensors cannot be realized on a single wafer / chip

Method used

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  • Magnetic sensing device, and magnetic sensing method and manufacturing technology thereof
  • Magnetic sensing device, and magnetic sensing method and manufacturing technology thereof
  • Magnetic sensing device, and magnetic sensing method and manufacturing technology thereof

Examples

Experimental program
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Effect test

Embodiment 1

[0064] see Image 6 , Figure 7 ,in, Figure 7 Yes Image 6 The projection along the A-A direction; the present invention discloses a magnetic sensing device, which includes a Z-axis magnetic sensing component, and the Z-axis magnetic sensing component includes: a base 10, a magnetic conduction unit 20, and an induction unit; the base 10 may include CMOS peripheral circuits.

[0065] The surface of the substrate 10 has a dielectric layer, and a groove 11 is opened in the dielectric layer. The substrate is provided with one row or several rows of grooves. In this embodiment, one row of grooves includes several sub-grooves 11 .

[0066] The main part of the magnetic conduction unit 20 is disposed in the groove 11 , and a part is exposed from the groove 11 to the surface of the substrate for collecting the magnetic signal along the Z-axis and outputting the magnetic signal to the sensing unit.

[0067] The induction unit is disposed on the surface of the base to receive the ...

Embodiment 2

[0085] The difference between this embodiment and Embodiment 1 is that in this embodiment, multiple magnetic permeable structures can share the same groove; please refer to Figure 9 The grooves 11 on the substrate 10 can be arranged in one or more rows, and one row of grooves 11 can be arranged as a long and narrow groove for shared use by multiple magnetic components.

[0086] In addition, in this structure, the magnetic conduction unit can be connected with the sensing unit, that is, the distance is 0um.

Embodiment 3

[0088] In this embodiment, the magnetic sensing device of the present invention further includes a CMOS chip, and the substrate described in Embodiment 1 is disposed on the CMOS chip. That is, the magnetic sensing device has the functions of the existing CMOS chip. That is to say, there are both CMOS chips and sensing devices on a single chip, which has a high degree of integration.

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Abstract

The invention discloses a magnetic sensing device and a magnetic sensing method thereof. The third-direction (Z-axis) magnetic sensing component comprises a substrate, a magnetic unit, a sensing unit, and a peripheral circuit; the surface of the substrate is provided with a groove; the main body part of the magnetic unit is arranged inside the groove and part of the magnetic unit is exposed out of the groove to the surface of the substrate for sensing magnetic signals in the Z-axis direction and outputting the magnetic signals; the sensing unit is arranged on the surface of the substrate for receiving the magnetic signals outputted by the magnetic unit in the Z-axis direction and measuring the magnetic field intensity and the magnetic field direction corresponding to the Z-axis direction according to the magnetic signals. According to the magnetic sensing device and the magnetic sensing method thereof, the X-axis sensing component, the Y-axis sensing component and the Z-axis sensing component can be arranged on the same wafer or chip, manufacturability is good, performances are excellent, and price competitiveness is obvious.

Description

technical field [0001] The present invention belongs to the technical field of electronic communication, and relates to a magnetic sensing device, in particular to a single-chip three-axis magnetic sensing device, and the present invention also relates to a magnetic sensing design method for the above-mentioned magnetic sensing device; meanwhile, the present invention further It relates to the preparation process of the above-mentioned magnetic sensing device. Background technique [0002] According to its principle, magnetic sensors can be divided into the following categories: Hall elements, magneto-sensitive diodes, anisotropic magnetoresistance elements (AMR), tunnel junction magnetoresistance (TMR) elements and giant magnetoresistance (GMR) elements, induction coils , superconducting quantum interference magnetometer, etc. [0003] Electronic compass is one of the important application fields of magnetic sensors. With the rapid development of consumer electronics in re...

Claims

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Application Information

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IPC IPC(8): G01R33/09
CPCG01R33/093G01R33/09G01R33/0011G01N27/72G01N27/9046G01V3/107G01R33/1223G01R33/12H10N50/01G01R33/0052G01R33/0206
Inventor 不公告发明人
Owner QST CORP
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