Magnetic sensing device, and magnetic sensing method and manufacturing technology thereof
A magnetic sensing and magnetic sensor technology, applied in the field of electronic communication, can solve the problems that the three-axis sensor cannot be manufactured at the same time, and achieve the effect of obvious price competitiveness, excellent performance and good manufacturability
Inactive Publication Date: 2014-06-25
QST CORP
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The invention discloses a magnetic sensing device and a magnetic sensing method thereof. The third-direction (Z-axis) magnetic sensing component comprises a substrate, a magnetic unit, a sensing unit, and a peripheral circuit; the surface of the substrate is provided with a groove; the main body part of the magnetic unit is arranged inside the groove and part of the magnetic unit is exposed out of the groove to the surface of the substrate for sensing magnetic signals in the Z-axis direction and outputting the magnetic signals; the sensing unit is arranged on the surface of the substrate for receiving the magnetic signals outputted by the magnetic unit in the Z-axis direction and measuring the magnetic field intensity and the magnetic field direction corresponding to the Z-axis direction according to the magnetic signals. According to the magnetic sensing device and the magnetic sensing method thereof, the X-axis sensing component, the Y-axis sensing component and the Z-axis sensing component can be arranged on the same wafer or chip, manufacturability is good, performances are excellent, and price competitiveness is obvious.
Application Domain
Permeability measurementsGalvano-magnetic device manufacture/treatment +4
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