Metal mesh cage film-plating clamping device

A clamping device and metal mesh technology, applied in metal material coating process, sputtering plating, ion implantation plating, etc., can solve the problems of workpiece collision damage, damage to workpiece edges and edges, etc., to avoid collision damage , Improve production efficiency, the effect of small free space

Inactive Publication Date: 2014-11-26
北京丹鹏表面技术研究中心
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, when the size of the workpiece to be plated is relatively large, for example, the size of the workpiece reaches more than 15mm, a large number of workpieces move and roll in the cage, and the workpieces at high places will roll down under the action of gravity, and frequently collide with the workpieces below. Damage the fragile corners and edges of the workpiece. In addition, the same size cage is used for workpieces of different sizes. Larger size workpieces are more prone to collision damage of workpieces in large size cages.

Method used

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  • Metal mesh cage film-plating clamping device
  • Metal mesh cage film-plating clamping device
  • Metal mesh cage film-plating clamping device

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Embodiment Construction

[0017] A new type of metal mesh cage coating clamping system proposed by the present invention is further described as follows in conjunction with the accompanying drawings and embodiments:

[0018] The embodiment of the first new metal mesh cage coating clamping device for vacuum ion coating machine proposed by the present invention Figure 1-3 As shown, the device of this embodiment consists of 10 mesh cages 1 arranged side by side to form a circumferentially distributed planetary cylindrical fixture. The maximum diameter of the fixture is about 586mm, and the length is about 807mm (equivalent to the size of the coating inner chamber of the coating machine) . Each net cage is the slender cylinder that has support shaft 11 at both ends, and each net cage is shaped as a circular tube; each net cage is installed on a planetary turret mechanism (figure Not shown in, this mechanism does not belong to the composition structure of the present invention); Each cage realizes a horiz...

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Abstract

The invention relates to a metal mesh cage film-plating clamping device, and belongs to the technical field of a vacuum film-plating device. The device is a planetary cylinder-type clamp composed of multiple mesh cages or multiple groups of mesh cages which are arranged side by side along a circumferential direction, each one of the mesh cages is cylindrical or multi-prismatic-type cylindrical, each one of the mesh cages is installed on a horizontal-rotation planetary rotating stand mechanism or on a horizontal-rotation planetary rotating stand mechanism with a two-process self-rotation mechanism by support shafts at two ends of the mesh cage, each one of the mesh cages realizes horizontal revolution once and horizontal autoroatation once or realizes horizontal revolution twice and horizontal autoroatation twice, the size and shape of the mesh cage match the shape and size of a workpiece to be plated with a film so that the workpiece can freely roll in the mesh cage under the gravity, and the length of the mesh cages matches the length of an uniform section of a film-plating zone of a film-plating machine. The metal mesh cage film-plating clamping device has the characteristics of workpiece assembling and unassembling operation convenience and no damage in workpiece film plating, and can be used for film plating processes on a lot of small and medium sized workpieces.

Description

technical field [0001] The invention belongs to the technical field of vacuum coating equipment, in particular to a metal mesh cage coating clamping device for vacuum coating. Background technique [0002] For large quantities of small-sized workpieces, cage barrel plating is generally used in traditional electroplating. That is, it avoids the clamping of a single workpiece, which is time-consuming and laborious; it also avoids the contact points with missing plating on the workpiece. This method is widely used and mature. A similar cage barrel plating method can also be used for vacuum coating. [0003] However, when the size of the workpiece to be plated is relatively large, for example, the size of the workpiece reaches more than 15mm, a large number of workpieces move and roll in the cage, and the workpieces at high places will roll down under the action of gravity, and frequently collide with the workpieces below. Damage the fragile corners and edges of the workpiece....

Claims

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Application Information

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IPC IPC(8): C23C14/50
Inventor 罗蓉平董骐孙广泰权新福
Owner 北京丹鹏表面技术研究中心
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