MEMS (micro-electromechanical system) resonator with LC series resonance circuit

Abstract

The invention relates to an MEMS (micro-electromechanical system) resonator with an LC series resonance circuit and belongs to the technical field of electronic science. The resonator comprises a vibration block and supporting anchors thereof, input / output electrodes, an input-end LC series resonance structure and input / output ends. Each input end is connected with one input electrode through an inductor, and the supporting anchors of the resonance block form capacitor structures in the LC series resonance circuit. The MEMS resonator with the LC series resonance circuit has the advantages that the LC series resonance circuit composed of the inductors and capacitors is added in front of the input electrodes of a conventional electrostatic drive capacitive MEMS resonator, and the series resonance frequency is identical to mechanical resonance frequency of the vibration block; by introduction of the structure, actual input voltage and energy conversion efficiency of the resonator are improved, the resonator is enabled to excite larger displacement by vibration, further output amplitude is heightened, and output performance of is resonator is improved effectively.

Description

technical field [0001] The invention belongs to the technical field of electronic science and relates to a micro-electromechanical system (MEMS) device, in particular to a MEMS resonator. Background technique [0002] The resonator is one of the key components in the communication system. At present, the quartz crystal resonator is still mainly used in the communication system. Although the quartz crystal has a high Q value, its disadvantages are also very obvious: high power consumption and large size, which are not conducive to meeting the needs of low power consumption and miniaturization of wireless communication systems. The MEMS resonator has become a very potential substitute for the quartz crystal resonator due to its low power consumption, high Q value and the advantages of being able to integrate with the IC process. [0003] At present, the most extensive and mature research is the electrostatically driven capacitive MEMS resonator. It has many features such as ...

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Problems solved by technology

[0004] The present invention aims at the technical problems of small output signal amplitude and poor loading capacity existing in the existing electrostatically driven capacitive MEMS resonator, and provides a MEMS resonator with an LC series resonant circuit. The resonator adds an inductance before the input electrode The LC series resonant circuit composed of capacitors can increase the actual input voltage and vibration driving force of the resonator under the same small signal excitation, thereby increasing the output current of the resonator

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