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Micro-electro-mechanical system (MEMS) structure and design structures

A micro-electro-mechanical system and voltage technology, applied in the field of manufacturing and use methods and design structures, and micro-electro-mechanical system structures, can solve problems such as reducing output performance

Active Publication Date: 2014-12-24
GLOBALFOUNDRIES INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Conventional manufacturing modes that attempt to reduce dielectric charging have known yield issues, e.g. reducing MEMS gaps can degrade yield performance

Method used

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  • Micro-electro-mechanical system (MEMS) structure and design structures
  • Micro-electro-mechanical system (MEMS) structure and design structures
  • Micro-electro-mechanical system (MEMS) structure and design structures

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Embodiment Construction

[0017] The present invention relates to integrated circuits, and more particularly to microelectromechanical systems (MEMS) structures, methods of fabrication, and designed structures. More specifically, the present invention relates to MEMS capacitive switches, methods of manufacture and use, and related design structures. Advantageously, the present invention significantly reduces or effectively eliminates dielectric charging across MEMS structures (eg, MEMS capacitive switches), thereby increasing the hold down lifetime of the MEMS structures. Furthermore, by implementing the operating parameters of the present invention, noise can be eliminated and MEMS structures such as capacitive switches will benefit from a long-term reduction in dielectric charging.

[0018] By way of example, the present invention contemplates bipolar operation using MEMS capacitive switches. For example, in an embodiment, a plurality of switches may be toggled after each use, such as after each pho...

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Abstract

Micro-Electro-Mechanical System (MEMS) structures, methods of manufacture and usage, and design structures are disclosed herein. The method includes applying a first voltage polarity to an actuator of a Micro-Electro-Mechanical System (MEMS) structure to place the MEMS structure in a predetermined state for a first operating condition. The method further includes applying a second voltage polarity which is opposite from the first voltage polarity to the actuator of the MEMS structure during a subsequent operating condition.

Description

technical field [0001] The present invention relates to integrated circuits, and more particularly to microelectromechanical system (MEMS) structures, methods of making and using them, and designing structures. Background technique [0002] Integrated circuit switches used in integrated circuits may be formed from solid state structures such as transistors or passive wiring (MEMS). MEMS switches are commonly employed because of their almost ideal isolation, which is a key requirement for wireless radio frequency applications, where they are used for mode switching in power amplifiers (PAs), as well as their low insertion loss (eg, resistance). MEMS switches can be used in a variety of applications, primarily analog and mixed-signal applications. One such example is a cellular telephone chip containing a power amplifier (PA) and circuitry tuned for various broadcast modes. Other examples include personal computers or electronic pads with WiFi or other wireless capabilities....

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01H59/00B81B7/00
CPCH01H59/0009H01H2057/006H01H2059/0054
Inventor W·A·约翰逊J·E·拉里A·K·斯坦珀K·M·沃森余佩玲
Owner GLOBALFOUNDRIES INC