Grid polarizing element, photo-alignment device, polarization method, and manufacturing method of grid polarizing element

Abstract

The object of the present invention is to provide a polarization element capable of irradiating polarized light ranged from a visible short-wavelength region to an ultraviolet region to a certain wide region and having excellent characteristics in the basic performance of extinction ratio and transmissivity. The solution of the present invention is characterized in that a stripe grid (2) installed on a transparent substrate (1) is made of an amorphous silicon, and a reflective index real part n is greater than an extinction coefficient k in the wavelength. For each linear portion (21) constituting the grid (2), a distance to the adjacent linear portion at one side is set as t, a distance to the adjacent linear portion at the other side is set as T, and the grid (2) periodically has a portion with essentially t less than T. When an average value of the width of each linear portion (21) is set as w, the portion with t less than T has a relation of t / T > 0.0159w+0.3735.

Description

technical field [0001] The invention of the present application relates to polarization techniques using grid polarizing elements. Background technique [0002] Polarizing elements for obtaining polarized light include various optical elements such as polarizing filters and polarizing films, such as polarized sunglasses, which are also widely used in display devices such as liquid crystal displays. There are several types of polarizing elements according to the way to extract polarized light, one of which is a wire grid polarizing element. [0003] The wire grid polarizing element has a structure in which a fine striped grid made of metal (conductor) is provided on a transparent substrate. By making the grid interval smaller than the wavelength of light to be polarized, it functions as a polarizer. Among the linearly polarized light, for the polarized light having an electric field component in the longitudinal direction of the grid, it is equivalent to a flat metal, so re...

AI Technical Summary

Problems solved by technology

[0016] In this way, in the application of optical processes such as photo-alignment, a practical polarizing element that can irradiate polarized light from the visible short-wavelength region to the ultraviolet region to a certain extent is desired, but the extinction ratio, transmission, etc. A polarizing element with such basic properties as high efficiency has not yet been developed

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