Utilization method of vacuum pipe installation support
A technology for vacuum pipelines and mounting brackets, which is applied in pipeline brackets, pipes/pipe joints/pipes, liquid variable capacity machinery, etc. The effect of reducing water leakage
Pending Publication Date: 2015-01-21
林博强
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Problems solved by technology
The centralized installation of these cooling water, nitrogen and compressed air requires a certain space for the placement of pipe supports. Since the demand points for these power conditions are relatively far away, there are many hoses scattered on the ground and on the supports, which is neither beautiful nor Safety, water leakage accidents often occur, and these centralized power supply conditions also occupy limited clean room space. In areas where equipment is installed intensively, sometimes there may be no space to place these power pipes, so that it will not be possible to operate the machine. installation
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[0008] First, locate the vacuum pump 1 according to the requirements of the equipment layout, and then confirm the position of the vacuum pipeline installation bracket 2. It is required that the installation of the vacuum pipeline installation bracket 2 can facilitate the entry and exit of the vacuum pump 1, and carry out the maintenance of the vacuum pump 1. All vertical vacuum pipeline installation supports 2 will adopt H-shaped steel, in order to keep the stability of vacuum pipeline support 2, support 2 and the building structure of the ground and upper part will have fixing.
[0009] See accompanying drawing, vacuum pump 1 intake, exhaust pipeline can be installed in the inside and outside of vacuum pipeline support 2, but in order to utilize pipeline support to the greatest extent, vacuum pump intake and exhaust pipeline are preferably installed in the inside of pipeline support 2. Power pipes, such as cooling water pipes, nitrogen pipes and compressed air pipes, can be i...
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The invention belongs to the fields of the manufacturing process of semiconductor chips and manufacturing of photovoltaic solar cell panels, and relates to a vacuum pipe system and a novel method for installing the pipe system. According to the method, centralized power condition supply is disintegrated into a support using machine table vacuum pipes and all power pipes (including cooling water, circulating water, nitrogen, compressed air and the like) mounted on machine tables. Accordingly, people can clearly recognize which machine tables the pipes belong to, using points are close, power pipelines can be effectively omitted, and accidents of water leakage and gas leakage due to too long hoses are reduced. The support of the vacuum pipes is used, so that the space occupied by independently installing the support is saved, and clean space can be more effectively utilized.
Description
technical field [0001] The present invention relates to the fields of semiconductor chip manufacturing process, photovoltaic solar cell plate manufacturing, etc., and particularly relates to the vacuum pipeline system and its corresponding pipeline system in the silicon chip manufacturing process in the above fields. Background technique [0002] In the manufacturing process of semiconductor chips and silicon-based photovoltaic solar cells, many processes need to be carried out under vacuum conditions, such as etching, CVD, implantation and other processes in semiconductor chip manufacturing, requiring the use of many vacuum pumps, sometimes one Each machine will use two to four vacuum pumps. In order to save the limited clean space, the vacuum pump of the machine is mostly installed on the next layer of the machine, that is, the lower mezzanine. In the lower mezzanine, besides the vacuum pump, the power transformer, power switch cabinet, radio frequency power supply, Chill...
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IPC IPC(8): F16L3/00
CPCF04B39/00F04B37/14
Inventor 林博强
Owner 林博强