Microcosmic frictional wear performance testing device
A technology of friction and wear and testing equipment, which is applied in the direction of measuring equipment, testing wear resistance, and adopting mechanical equipment, etc., to achieve the effects of ensuring accuracy, strong function expansion, and improving resolution
Inactive Publication Date: 2015-01-21
CHINA UNIV OF MINING & TECH
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Problems solved by technology
As people study the microscopic world more and more deeply, high-speed MEMS devices will definitely be the main direction of future development. Obviously, low-speed friction testing machines can no longer fully meet the research needs. Therefore, it is necessary to design corresponding MEMS devices in high-speed motion. The experimental platform, and its friction performance research
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[0017] Such as figure 1 , 2 As shown, the upper test piece 4 and the lower test piece 5 of the microscopic friction and wear performance testing device (a single crystal silicon cylinder and a single crystal silicon wafer with a diameter of 2 mm) form a pair of friction pairs, and the upper test piece 4 is installed on a high-speed DC On the output shaft of the motor 10, the lower test piece 5 is arranged at the center of the elastic sensitive element 6, and the reflective prism 16 is installed on the lower part of the elastic sensitive element 6. When the high-speed DC motor is working, the upper and lower test pieces 4, 5 Generate friction and generate pressure on the lower test piece 5 (in order to obtain different experimental data, the speed of the motor can be adjusted through the electronic speed controller, and the pressure of the motor on the lower test piece 5 can also be adjusted at the same time); at this time, the elastic sensitive element Both the horizontal sen...
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The invention relates to a microcosmic frictional wear performance testing device. The microcosmic frictional wear performance testing device is characterized by comprising a laser device, a reflecting prism, a plane reflecting mirror, a position detector and a laser displacement sensor, wherein the laser device and the plane reflecting mirror are arranged perpendicularly to the reflecting prism; the position detector and the plane reflecting mirror are positioned on the same axis; the laser displacement sensor is arranged below the reflecting prism; an elastic sensitive element is embedded on an objective table; a lower test element is installed on the elastic sensitive element; the reflecting prism is installed at the lower part of the elastic sensitive element and is used for outputting the deformation information of the elastic sensitive element. The device can be used for researching the tribology performance of a micro device at high speed; a non-contact mode is adopted for measuring positive pressure and friction force so as to guarantee the measurement precision of the loading force and the friction force; the deflection angle of a test element can be amplified via a light path so as to improve the resolution. Additionally, the microcosmic frictional wear performance testing device is simple in structure, is high in reliability, and is great in function expansibility.
Description
technical field [0001] The present invention relates to the technical field of microelectromechanical system (MEMS) friction and wear and lubrication, in particular to a method for testing the relative sliding surface in various lubrication methods (including microscopic modification of material surface, solid film lubrication, molecular ultra-thin film) Lubrication, gas phase lubrication, liquid lubrication, etc.) microscopic friction and wear performance testing device for tribological properties. Background technique [0002] The development of modern near-surface testing technology and instruments provides an effective means to observe surface phenomena and their changes on the atomic and molecular scales, making experimental research on micro-tribology possible. Different from macroscopic friction instruments, microscopic testing instruments need to meet the following requirements: directly or indirectly measure the magnitude of normal pressure and friction; Cattle. W...
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Login to View More IPC IPC(8): G01N3/56G01N19/02
Inventor 刘同冈吴健郭岩刘帅尹浩赵志强
Owner CHINA UNIV OF MINING & TECH