A fixing device used for silicon corrsion
A technology of fixing devices and snapping devices, applied in the field of computers, can solve problems such as low pass rate, poor quality of silicon wafers, large contact area between silicon chips and accommodating devices, etc., and achieve the goal of improving quality and pass rate, and reducing contact area Effect
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[0045] Example one
[0046] See figure 1 The embodiment of the present application provides a fixing device applied to silicon etching. The fixing device 10 includes a first frame 20 and a second frame 30, and a connecting device for connecting the first frame 20 and the second frame 30 , The connecting device includes a first connecting piece 40 and a second connecting piece 41.
[0047] Wherein, the first clamping device 50 is fixedly connected to the inner side of the first film frame 20, the second clamping device 60 is fixedly connected to the inner side of the second film frame 30, and the lower end of the first clamping device 50 has a first concave portion 51, The lower end of the second engaging device 60 has a second concave portion 61.
[0048] See figure 2 , The first frame 20 includes a first frame 21, a first bottom column 22 fixed at the lower end of the first frame 21, and a first upper column 23 fixed at the upper part of the first frame 21. The middle part of the ...
Example Embodiment
[0062] Example two
[0063] The second embodiment of the present application is different from the first embodiment in that the structures of the first engaging device and the second engaging device are different. For the sake of brevity of the description, the similarities between the second embodiment of the present application and the first embodiment can be referred to the first embodiment, which will not be repeated here. The following describes in detail the differences between the second embodiment of the application and the first embodiment, including:
[0064] The first engaging device 50 includes N clips, where N is an integer not less than 2, that is, the first engaging device includes at least a first clip and a second clip. See Picture 9 Take the first clamping device 50 only including the first clip 52 and the second clip 53 as an example. The first clip 52 includes a first connecting piece 54 and a fifth connecting piece 58. The fifth connecting piece 58 is fixed ...
Example Embodiment
[0073] Example three
[0074] The difference between the third embodiment of the present application and the first embodiment is that a first supporting device is fixedly connected to the outer side of the first film rack, and a second supporting device is fixedly connected to the outer side of the second film rack, so that the fixing device It remains stable during silicon wafer etching. For the sake of brevity of the description, the similarities between the third embodiment of the present application and the first embodiment can be referred to the first embodiment, which will not be repeated here. The following describes in detail the differences between the third embodiment of the application and the first embodiment, including:
[0075] The first supporting device includes N clips, where N is an integer not less than 2, that is, the first supporting device includes at least a fifth clip and a sixth clip. See Picture 11 Take the first supporting device including the fifth cl...
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