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Radiation image pickup unit and radiation image pickup display system

A technology of radiographic imaging and radiation, which is applied in radiation control devices, TV system components, image communication, etc., can solve problems such as reliability degradation and characteristic degradation, and achieve suppression of characteristic degradation, suppression of threshold voltage shift, and high reliability effect

Inactive Publication Date: 2015-01-21
SONY SEMICON SOLUTIONS CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The disadvantage is that the reliability decreases due to the deterioration of TFT characteristics.

Method used

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  • Radiation image pickup unit and radiation image pickup display system
  • Radiation image pickup unit and radiation image pickup display system
  • Radiation image pickup unit and radiation image pickup display system

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Experimental program
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Embodiment approach

[0039] (structure)

[0040] figure 1 A block diagram configuration of the entire radiation imaging apparatus (radiation imaging apparatus 1 ) according to an embodiment of the present invention is illustrated. The radiation imaging apparatus 1 reads information of a subject (takes an image of the subject) based on incident radiation Rrad (for example, α-rays, β-rays, γ-rays, and X-rays). The radiation imaging apparatus 1 includes a pixel section 11, and further includes a row scanning section 13, an A / D (analog-digital) conversion section 14, a column scanning section 15, and a system control section 16. The section 14 , the column scanning section 15 and the system control section 16 function as a driving circuit of the pixel section 11 .

[0041] (pixel part 11)

[0042] The pixel unit 11 includes a plurality of pixels (imaging pixels and unit pixels) 20 each for generating signal charges by radiation. A plurality of pixels 20 are two-dimensionally arranged in a matrix. ...

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Abstract

A radiation image pickup unit includes: a plurality of pixels each configured to generate a signal charge based on a radiation; and a field effect transistor to readout the signal charges from the plurality of pixels. The transistor includes a semiconductor layer including an active layer, a first gate electrode disposed to face the semiconductor layer, a first gate insulating film provided between the semiconductor layer and the first gate electrode, and including a first silicon oxide film, a source electrode and a drain electrode that are electrically connected to the semiconductor layer, and a second silicon oxide film provided in a layer different from the first gate insulating film. The first silicon oxide film of the first gate insulating film is a porous film lower in film density than the second silicon oxide film.

Description

technical field [0001] The present invention relates to a radiographic apparatus that acquires images based on radiation such as X-rays, and to a radiographic display system provided with such a radiographic apparatus. Background technique [0002] Radiation imaging apparatuses that acquire images of subjects as electrical signals based on radiation such as X-rays have been proposed (for example, Japanese Unexamined Patent Application Publication Nos. 2008-252074 and 2004-265935). [0003] In the aforementioned radiation imaging apparatus, a thin film transistor (TFT: thin film transistor) is used as a switching element to read out signal charges from pixels. Its disadvantage is that the reliability is lowered due to the deterioration of the characteristics of the TFT. Contents of the invention [0004] It is desirable to provide a radiographic apparatus capable of achieving high reliability while suppressing deterioration of characteristics of transistors, and a radiogra...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L27/146H04N5/32
CPCH01L27/14643H01L27/14632
Inventor 山田泰弘高德真人
Owner SONY SEMICON SOLUTIONS CORP
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