Detection device based on saw sensor
A detection device and sensor technology, which is applied in the direction of using sonic/ultrasonic/infrasonic waves to analyze fluids, etc., can solve the problems of cumbersome circuit layout, inaccurate detection results, detection of liquid leakage, etc., to achieve simple and effective sealing methods, accurate detection results, and prevent The effect of displacement
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[0028] The specific embodiments of the present invention will be further described below in conjunction with the accompanying drawings.
[0029] Such as figure 1 , 2 , 3, the detection device based on the SAW sensor includes a base plate 1, a substrate 2, a SAW chip 3, the base plate 1 is provided with a detection circuit; the SAW chip 3 includes a piezoelectric substrate 301, a sensing film 302, an input The interdigital electrode 303, the output interdigital electrode 304, the sensing film 302, the input interdigital electrode 303, and the output interdigital electrode 304 are all arranged on the same surface of the piezoelectric substrate 301, the input interdigital electrode 303, the output interdigital electrode The electrodes 304 are respectively arranged on both sides of the sensing film 302, the input electrodes 303 are connected with the input electrodes 305 for accessing external signals, the input electrodes 305 are connected with the detection circuit, and the out...
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