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A Flush Membrane Piezoresistive Ceramic Pressure Sensor

A pressure sensor and piezoresistive technology, applied in the field of flush-membrane piezoresistive ceramic pressure sensors, can solve the problems of fragility of alumina ceramics, and achieve the effect of improving mechanical strength, good stability and ensuring reliability

Active Publication Date: 2018-04-27
无锡盛赛传感科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In view of the fragile shortcomings of alumina ceramics, it is of great significance to develop piezoresistive ceramic pressure sensors with high overload performance

Method used

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  • A Flush Membrane Piezoresistive Ceramic Pressure Sensor
  • A Flush Membrane Piezoresistive Ceramic Pressure Sensor
  • A Flush Membrane Piezoresistive Ceramic Pressure Sensor

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Embodiment Construction

[0021] Figure 1 to Figure 3b As shown, it involves a flush membrane piezoresistive ceramic pressure sensor, including a ceramic ring 2, a ceramic elastic diaphragm 1 printed and sintered on the top of the ceramic ring 2 through glass glaze paste, and a ceramic elastic diaphragm 1 printed and sintered on the upper part of the ceramic ring 2 through conductive paste. The signal conditioning circuit 3 at the bottom of the ceramic ring 2; wherein, the ceramic elastic diaphragm 1 is evenly provided with four pads 11 connected to the four ceramic ring through holes 21 on the ceramic ring 2, and connected to the pads 11 There are four bridge resistors 10 constituting a Wheatstone bridge; a bridge trimming resistor 12 is arranged between the pad 11 and the bridge resistor 10 .

[0022] Both the ceramic ring 2 and the ceramic elastic diaphragm 1 in this design can be designed in a square or circular structure, which can meet the needs of different occasions, reduce manufacturing costs...

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Abstract

The invention discloses a flush membrane piezoresistive ceramic pressure sensor, which includes a ceramic ring, a ceramic elastic diaphragm printed and sintered on the upper part of the ceramic ring by glass glaze paste, and a ceramic elastic diaphragm printed and sintered on the lower part of the ceramic ring by conductive paste The signal conditioning circuit; wherein, the ceramic elastic diaphragm is uniformly provided with four pads respectively connected to the four ceramic ring through holes on the ceramic ring, and connected to the pads to form a Wheat Four bridge resistors of the Dayton bridge; a bridge trimming resistor is arranged between the pad and the bridge resistors. In the present invention, the ceramic elastic diaphragm is printed and sintered on the ceramic ring through glass glaze paste, which overcomes the fragile problem of the ceramic diaphragm and ensures the reliability of the mechanical structure of the sensor; at the same time, the signal conditioning circuit is also printed and sintered through conductive paste On the ceramic ring, the overall accuracy of the sensor is higher and the stability is better.

Description

technical field [0001] The invention relates to a flush membrane piezoresistive ceramic pressure sensor. Background technique [0002] In the traditional ceramic pressure sensor, the aluminum oxide ceramic diaphragm is generally used as the strained elastic body of the pressure sensor, and four thick film strain resistors are printed and sintered on its surface by a thick film process to form a Wheatstone bridge. . When the ceramic diaphragm produces a small amount of linear deformation under pressure (for example, the longitudinal deformation of a 0.3mm diaphragm at 10bar is 6-10μm from zero to full scale). Under the excitation voltage, the output terminal of the bridge circuit will produce a voltage output that is linearly related to the pressure. [0003] At present, there are two structures of ceramic elastomer carriers: Flushdiaphragm ceramic pressure sensor and Integrated ceramic pressure sensor. [0004] The flush diaphragm ceramic pressure sensor consists of two p...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L1/18
Inventor 徐兴才徐雷严群丰
Owner 无锡盛赛传感科技有限公司
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