Confocal axial response curve peak position extracting algorithm

A technology of axial response and curve peak, applied in the field of confocal scanning optical measurement, which can solve the problems of low speed accuracy, low data utilization, and inability to balance speed and accuracy.

Inactive Publication Date: 2015-02-18
HARBIN INST OF TECH
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Problems solved by technology

The first two methods are faster but less accurate, Gaussian function fitting method is more accurate but slow, and the data utilization

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Embodiment Construction

[0020] The detailed description will be given below in conjunction with the accompanying drawings and specific embodiments, so as to have a deeper understanding of the purpose and technical solutions of the present invention.

[0021] The peak position extraction algorithm of the confocal axial response curve in this embodiment, the flow chart is as follows figure 1 shown. The algorithm consists of the following steps:

[0022] Step a, normalize the data, specifically divide the measured original data by the maximum value of the original data; select effective data from the measured data, denoted as (x 1 ,y 1 ), (x 2 ,y 2 ),..., (x n ,y n ), the axial scanning interval is z=0.1 μm, and the number of scanning layers is N=200 layers; wherein, the effective data is data greater than 50% of the original data maximum value in the original data and its index value;

[0023] Step b, with sinc 4 The (a(x-b)) function is the objective function, and the initial value of the obje...

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Abstract

The invention discloses a confocal axial response curve peak position extracting algorithm and belongs to the technical field of confocal scanning optical measurement. The method comprises the following steps of at first, normalizing data, and selecting effective data from measured data; taking a sinc4(a(x-b)) function as an objective function, and calculating the initial value of target parameter according to measured parameters; taking the sinc4(a(x-b)) function as the objective function, and using Levenberg-Marquardt algorithm to perform fitting to obtain the target parameter; according to the target parameter, calculating peak position. According to the confocal axial response curve peak position extracting algorithm, a confocal axial response curve peak position is obtained by taking sinc4 as the fitting objective function, so that data utilization rate and measurement uncertainty can be improved, meanwhile, iteration times is reduced, and the operation time of the extracting algorithm is reduced.

Description

technical field [0001] A confocal axial response curve peak position extraction algorithm belongs to the technical field of confocal scanning optical measurement. Background technique [0002] Confocal scanning microscope measurement technology is a three-dimensional optical microscopy technology for micron and submicron scale measurement. It is widely used in materials science, microelectronics, optics, bioengineering and Three-dimensional microscale structure measurement in the medical field. The key of the confocal scanning second microscope measurement technology is the extraction of the peak position of the corresponding curve of the confocal axis, which is related to the accuracy of the three-dimensional structure measurement. The commonly used extraction methods include the maximum value method, the centroid method, and the Gaussian function fitting method. The first two methods are faster but less accurate, Gaussian function fitting method is more accurate but slow...

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Application Information

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IPC IPC(8): G06F19/00
Inventor 刘俭谭久彬刘辰光王红婷
Owner HARBIN INST OF TECH
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