A kind of microwave film resistance manufacturing method
A manufacturing method and microwave thin film technology, applied in semiconductor/solid-state device manufacturing, circuits, electrical components, etc., can solve the problems of inability to balance the accuracy and efficiency of resistance adjustment, achieve good promotion and use value, improve resistance adjustment efficiency, and meet Effect of Resistor Accuracy Requirements
Active Publication Date: 2017-05-24
CHINA ELECTRONIS TECH INSTR CO LTD
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Problems solved by technology
[0010] The purpose of the present invention is to provide a method for manufacturing microwave thin film resistors, which solves the problem that the precision and efficiency of resistance adjustment can not be balanced in the process of manufacturing thin film circuits
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[0038] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.
[0039] The invention provides a method for manufacturing microwave thin film resistors. By adopting a design method of unequal square resistance, low-precision resistors are designed with high-square resistance, and high-precision resistors are designed with low-square resistance, which reduces the resistance of high-precision resistors and avoids thermal oxidation. After the resistance is adjusted, the resistance value of the resistance ...
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The invention provides a microwave film resistor manufacture method. The method comprises the following steps that: step (101), resistors are classified, so that the resistors are divided into low-precision resistors and high-precision resistors; step (102), high sheet resistance design is performed on the low-precision resistors; step (103), low square resistance design is performed on the high-precision resistors; step (104), resistance and circuit graphs are drawn; step (105), thin film technologies are adopted to manufacture a thin film resistor; step (106), a thermal oxidation method is adopted to perform resistance regulation on the low-precision resistors; and step (107), an anodic oxidation method is adopted to perform resistance regulation on the high-precision resistors. According to the microwave film resistor manufacture method of the invention, an unequal sheet resistance design method is adopted, and therefore, the resistance of the high-precision resistors can be decreased, and out-of-tolerance of the resistance values of the resistors after resistance regulation of the thermal oxidation method can be avoided; and the thermal oxidation method and the anodic oxidation method are adopted to perform resistance regulation stepwise, and therefore, resistance regulation efficiency can be improved, and requirements for resistance accuracy can be satisfied. The microwave film resistor manufacture method has high popularization and use value.
Description
Technical field [0001] The invention relates to the technical field of integrated circuit technology, in particular to a method for manufacturing microwave thin film resistors. Background technique [0002] Microwave hybrid integrated circuits mainly integrate resistors, capacitors, and even inductors into circuits using ceramic gemstones as dielectric materials, and use metal hole grounding, air bridges, and dielectric bridges to achieve grounding, bridging and interconnection to achieve more Highly integrated product circuit. The integration of thin film resistors is an important part of it. In the process of thin film resistor processing, the resistance value of the resistance should be adjusted to meet the design resistance value requirements. How to adjust the resistance accurately and quickly has become a key process technology for the integration of thin film resistors. [0003] The manufacture of microwave thin film resistors is divided into two parts: design and thin fi...
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IPC IPC(8): H01L21/02
CPCH01L21/02
Inventor 王进马子腾许延峰
Owner CHINA ELECTRONIS TECH INSTR CO LTD