The application discloses a thin film circuit
ceramic single-side
grinding method and relates to the field of
ceramic surface fine
grinding processing technology, which comprises the following steps: step one, symmetrically attaching
ceramic substrates with white films to a ceramic disc smeared with
paraffin wax; step two, cooling and bonding the ceramic disc after the ceramic substrates are attached, pressing the ceramic substrates and the ceramic disc by using the white film-attached rubber pad, and uniformly extruding the hot-melt
paraffin wax; step three, after the cooling is completed, taking out the ceramic disc, testing the
paraffin wax-attaching thickness error, comparing the ceramic disc plane with zero, and then testing the substrate thickness by using the five-point testing method on the
ceramic substrate to the set tolerance fluctuation range; step four, when the disc surface of the ceramic disc reaches the set flatness,
grinding is carried out according to the set
fixed interval time; step five, after the grinding is completed, the thickness is retested, if the thickness is qualified, the grinding is completed, if the thickness is unqualified, the substrate is turned over by 180 degrees, the grinding is continuously carried out for the same time, and the grinding is not stopped until the thickness is qualified. The application can avoid scratches on the
ceramic substrate and reduce the
breakage rate.