Substrate separation inspection method, substrate separation device, and flexible display manufacturing method
An inspection method and technology for separating equipment, applied in chemical instruments and methods, instruments, layered products, etc., can solve problems such as the difficulty of flexible substrates, and achieve the effect of reducing the defect rate
Active Publication Date: 2019-04-19
SAMSUNG DISPLAY CO LTD
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Problems solved by technology
However, it is not easy to apply flexible substrates for use in panel manufacturing for glass substrates since flexible substrates have limited heat resistance
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[0030] The aspects and features of the present invention and methods for achieving the aspects and features will become apparent through the embodiments to be described in detail with reference to the accompanying drawings. However, the present invention is not limited to the embodiments disclosed hereinafter, but can be implemented in various forms. The contents defined in the description, such as detailed construction and elements, are only used to help those of ordinary skill in the art understand the specific details of the present invention, and the present invention is only limited within the scope of the appended claims.
[0031] The term "on" used to designate that an element is on another element or on a different layer or layer includes an element directly on another element or layer and an element on another element through another layer or another element. condition on the component. Throughout the description of the invention, the same reference numerals are used...
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Abstract
The invention provides a substrate separation inspection method, a substrate separation device and a flexible display manufacturing method. A substrate separation apparatus provided according to another aspect of the present invention includes a substrate assembly, a laser irradiation unit, a detection unit, and a determination unit, wherein the substrate assembly has a first substrate and a second substrate attached to the first substrate. At the bottom, the laser irradiation unit irradiates the laser light to the substrate assembly, the detection unit obtains the optical characteristic information of the first substrate and / or the second substrate, and the determination unit determines the first substrate and the second substrate based on the optical characteristic information obtained by the detection unit Whether the separation state of the two substrates is normal.
Description
technical field [0001] The present invention relates to a substrate separation method, a substrate separation device, and a method for manufacturing a flexible display using the substrate separation method and the substrate separation device, and more particularly, to a method for separating a first substrate from a second substrate and Substrate separation inspection method for inspecting separation state of first substrate from second substrate, substrate separation apparatus for separating first substrate from second substrate, and substrate separation inspection method using the substrate separation inspection method and the substrate Method for manufacturing flexible displays by separating devices. Background technique [0002] In recent years, the global display market has rapidly shifted to flat panel displays (FPDs), which are easy to manufacture as large, thin displays. [0003] FPDs include liquid crystal displays (LCDs), plasma display panels (PDPs), and organic ...
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IPC IPC(8): G09F9/30B32B38/10
CPCG09F9/30H01L27/1266B32B38/10B32B43/006H10K71/70H10K71/80H10K71/00
Inventor 孙贞洛姜镐龙金桢晧张硕元
Owner SAMSUNG DISPLAY CO LTD