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Scrubber for treating processing waste gas

A treatment process and scrubber technology, which is applied in the fields of electrical components, chemical instruments and methods, semiconductor/solid-state device manufacturing, etc., can solve the problems of low treatment efficiency, achieve the effects of improving treatment efficiency, easy management, and saving operating costs

Active Publication Date: 2015-03-25
上海协微环境科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] Moreover, when using the wet process, there is a problem that the treatment efficiency of the water-soluble gas containing the hydrogen halide compound is low.

Method used

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  • Scrubber for treating processing waste gas
  • Scrubber for treating processing waste gas
  • Scrubber for treating processing waste gas

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Embodiment Construction

[0041] Hereinafter, the scrubber for treating process waste gas of the present invention will be described in detail with reference to the accompanying drawings and through preferred embodiments.

[0042] First, the structure of the scrubber for treating process waste gas of the present invention will be described.

[0043] figure 1 It is a front view of a scrubber for treating process waste gas according to an embodiment of the present invention. figure 2 It is a top view of a scrubber for treating process waste gas according to an embodiment of the present invention. image 3 Yes figure 1 Horizontal section view of A-A. Figure 4 Yes image 3 Vertical section view of B-B. Figure 5 It is a partially cut perspective view of the first cooling unit of the figure. Image 6 Yes figure 2 Vertical section view of C-C.

[0044] Such as Figure 1 to Figure 6 As shown, the scrubber for treating process waste gas of the present invention includes: a plasma treatment unit 100, a cooling unit ...

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Abstract

The invention provides a scrubber for treating processing waste gas, and the scrubber comprises a plasma processing unit which enables plasma to contact with the processing waste gas and enables the processing waste gas to be decomposed; a cooling unit which is used for cooling the flowing-in processing waste gas decomposed by the plasma processing unit, so as to collect reaction by-products; and a reaction unit which enables the processing waste gas flowing out from the cooling unit to contact with amine substances. The water-soluble gas in the processing waste gas is eliminated through acid-base reaction.

Description

Technical field [0001] The present invention relates to a scrubber for processing flat panel display devices such as semiconductors, liquid crystal displays (LCD) or organic light emitting displays (OLEDs), solar cells and LED manufacturing processes, etc. . Background technique [0002] The manufacturing process of flat-panel display devices such as semiconductors, LEDs, or OLEDs, and the manufacturing process of solar cells or LEDs, which use special gases, generate exhaust gas that is harmful to the human body and the environment (hereinafter referred to as "process exhaust gas"). In order to prevent environmental pollution caused by the process waste gas, the process waste gas needs to be purified before being discharged to the outside. [0003] The process waste gas is purified by a scrubber for treating the process waste gas and discharged to the outside. Generally speaking, the scrubber for treating process waste gas includes: a reaction chamber, which is used to provide a...

Claims

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Application Information

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IPC IPC(8): B01D53/75B01D53/68
CPCB01D53/34B01D53/68B01J20/00H01L21/02
Inventor 朴商淳郑钟文
Owner 上海协微环境科技有限公司