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Transfer module and substrate processing apparatus comprising the same

PendingCN122294885AReduced size spaceReduce setup spaceMechanical engineeringPhysics
Embodiments of the present invention provide a transfer module and a substrate processing apparatus including the same. The transfer module includes: a housing; a first transfer section for transferring a substrate and rotatably connected to the housing in a first rotational direction; a second transfer section for transferring a storage container containing the substrate, arranged vertically spaced from the first transfer section and rotatably connected to the housing in a direction different from the first rotational direction; a drive section connected to the first transfer section via a connecting member to provide power for rotating the first transfer section; and a transmission unit connecting the first transfer section and the second transfer section and transmitting the power to the second transfer section.
Owner:SYSTEM ENGINEERING MEGA SOLUTION CO LTD