The invention discloses a
corrosion-resistant and high-thermal-
conductivity epoxy encapsulated
metal film sensor and a preparation method and application thereof, and belongs to the field of
temperature measurement. The invention aims to solve the problems that the
performance index of the sensor is reduced, the working reliability is reduced and the production cost is too high due to poor
sintering protection of the glass
slurry of the
metal film sensor and
secondary packaging. A
corrosion-resistant and high-thermal-
conductivity epoxy encapsulated
metal film sensor comprises a high-thermal-
conductivity substrate, a metal film
resistor, a glass sealing layer, a wire and a high-thermal-conductivity
epoxy encapsulation which form an integrated structure. The method comprises the following steps: 1, pretreating an aluminum
nitride substrate; 2, preparing a metal film
resistor; 3, preparing a glass sealing layer; 4,
welding a lead; and 5, high-heat-conductivity epoxy encapsulation. The
corrosion-resistant and high-thermal-conductivity epoxy encapsulated metal film sensor prepared by the invention can realize high-precision, high-stability and long-life measurement at the temperature of-50 to 150 DEG C, the
measurement precision is higher than the industrial standard by more than three times, and the corrosion-resistant and high-thermal-conductivity epoxy encapsulated metal film sensor has a wide market application prospect.