Bionic hair sensor for flow velocity, acceleration and angular velocity sensitivity

Abstract

The invention relates to a bionic hair sensor for flow velocity, acceleration and angular velocity sensitivity. The bionic hair sensor comprises top hair, a middle silicon micro sensor structure and a bottom signal lead manufactured on a glass substrate. The top hair can drive an outer frame in the silicon micro sensor structure to swing left and right. The negative stiffness effect principle of electrostatic force is used for detecting the acceleration and the flow velocity. A sensor array mode is used for distinguishing the detection of the acceleration and detection of the flow velocity. When external input is acceleration input, all the sensors can be subjected to action to generate torque. Two sub-structures in the silicon micro sensor structure are of gyroscope structures and are used for detecting the external angular velocity, the two sub-structures are arranged in left-and-right symmetry and are two times of a single gyroscope in terms of output signals, a variable-area type capacitor is used for detection, and the interference on detection by the driving movement is relieved.

Description

technical field [0001] The invention belongs to the field of microelectronic mechanical inertial measurement, in particular to a bionic hair sensor sensitive to flow velocity, acceleration and angular velocity. Background technique [0002] Micromachined inertial instruments include mechanical gyroscopes (MMG) and micromachined accelerometers (MMA). The micromechanical structure and the required electronic circuits are fully integrated on a silicon chip by using the microelectronic processing technology, so as to achieve a high degree of unity in terms of performance, price, volume, weight, and reliability. However, to achieve simultaneous measurement of acceleration and angular rate, it is often necessary to use a combination of gyroscope and accelerometer, which increases the complexity of the system, is not conducive to the miniaturization of the measurement device, and also increases the overall cost, which is not conducive to detection Large-scale application of equipm...

AI Technical Summary

Problems solved by technology

However, most of the current hair-type sensors developed by institutions are flow rate sensors, which can only measure the fluid velocity, have a single function, and have a complex structure and poor practicability.

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