A Bionic Hair Sensor Sensitive to Flow Velocity, Acceleration and Angular Velocity

A technology of bionic hair and acceleration, applied in speed/acceleration/shock measurement, acceleration measurement using gyroscope, fluid velocity measurement, etc., can solve the problems of single function, poor practicability, complex structure, etc. Effect of thermal stress and high measurement accuracy

Active Publication Date: 2017-06-23
SOUTHEAST UNIV
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Problems solved by technology

However, most of the current hair-type sensors developed by institutions are flow rate sensors, which can only measure the fluid velocity, have a single function, and have a complex structure and poor practicability.

Method used

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  • A Bionic Hair Sensor Sensitive to Flow Velocity, Acceleration and Angular Velocity
  • A Bionic Hair Sensor Sensitive to Flow Velocity, Acceleration and Angular Velocity
  • A Bionic Hair Sensor Sensitive to Flow Velocity, Acceleration and Angular Velocity

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specific Embodiment

[0039] Such as figure 1 As shown, the bionic hair sensor sensitive to flow velocity, acceleration and angular velocity of the present invention is composed of upper, middle and lower layers, the upper layer is polymer hair, the middle layer is a silicon microsensor structure, and the lower layer is a signal lead made on a glass substrate . Used to measure the flow velocity and acceleration along the X-axis direction in the same plane, and the angular velocity input in the Z-axis direction, the silicon microsensor structure consists of an outer frame 6, two sets of symmetrical middle frames 110 and two sets of symmetrical inner frames 120 compositions. The external frame is connected with anchor points 5 fixed on the glass substrate through torsion beams 4 . Two identical middle frames 110 are symmetrically arranged inside the outer frame 5, and are connected to anchor points fixed on the glass substrate through U-shaped elastic beams 103, so that the middle frames are suspen...

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Abstract

The invention relates to providing a bionic hair sensor sensitive to flow velocity, acceleration and angular velocity, which includes hair on the top, a silicon microsensor structure in the middle, and signal leads fabricated on a glass substrate at the bottom. In the present invention, the top hair can drive the outer frame in the silicon microsensor structure to twist left and right; the negative stiffness effect principle of electrostatic force is used to realize the detection of acceleration and flow velocity; the detection of acceleration and fluid velocity is realized by adopting the form of sensor array distinction. When the external input is an acceleration input, all sensors will be affected and twisted. The two substructures in the silicon microsensor structure are gyroscope structures, which are used to detect the angular velocity of the outside world. They are arranged symmetrically on the left and right, which is twice the output signal of a single gyroscope; the variable-area capacitance detection is used to reduce the impact of driving motion. detection interference.

Description

technical field [0001] The invention belongs to the field of microelectronic mechanical inertial measurement, in particular to a bionic hair sensor sensitive to flow velocity, acceleration and angular velocity. Background technique [0002] Micromachined inertial instruments include mechanical gyroscopes (MMG) and micromachined accelerometers (MMA). The micromechanical structure and the required electronic circuits are fully integrated on a silicon chip by using the microelectronic processing technology, so as to achieve a high degree of unity in terms of performance, price, volume, weight, and reliability. However, to achieve simultaneous measurement of acceleration and angular rate, it is often necessary to use a combination of gyroscope and accelerometer, which increases the complexity of the system, is not conducive to the miniaturization of the measurement device, and also increases the overall cost, which is not conducive to detection Large-scale application of equipm...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01P3/14G01P5/00G01P15/14
Inventor 杨波胡迪邓允朋王行军戴波
Owner SOUTHEAST UNIV
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