Lifting device and automatic handling system thereof

A lifting device and handling system technology, applied to cranes, transportation and packaging, trolley cranes, etc., can solve problems such as position deviation, elastic fatigue, abnormality of unmanned vehicles, etc., and achieve the effect of reducing failures

Inactive Publication Date: 2015-04-15
MICRON TECH INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, in a general automated handling system, when the parts of the lifting device used to grab the wafer box are not in a horizontal state or the suspension components shake, it often causes abnormalities in the unmanned guided vehicle
The reason is that there is an alignment problem between the grabbing part and the wafer cassette, and the swing of the suspension element usually causes position deviation; in addition, if the suspension element is selected from a timing belt, it may be caused by elastic fatigue after a long period of use. This grabbing part is not in a horizontal state, so it cannot grab the wafer cassette smoothly
[0005] Based on the above, at this time, the unmanned transport vehicle can only stay in place and wait for the abnormality to be eliminated, and at the same time, it will cause the rear transport vehicle to be unable to move and prolong the overall handling time; although the frequency of abnormal events can be reduced by regular maintenance of the lifting device , but these conditions still affect the productivity efficiency of semiconductor fabs

Method used

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  • Lifting device and automatic handling system thereof
  • Lifting device and automatic handling system thereof
  • Lifting device and automatic handling system thereof

Examples

Experimental program
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Effect test

no. 1 example ］

[0050] see figure 1 , is a perspective view of the automated handling system according to the first embodiment of the present invention. The automatic transport system 1 of this embodiment includes a suspended track 10 , at least one automatic transport vehicle 20 and at least one lifting device 30 . Wherein the suspended track 10 is suspended on the ceiling (not shown) in the semiconductor manufacturing factory, the automatic transport vehicle 20 is movably assembled on the suspended track 10, and the lifting device 30 is suspended on the automatic transport vehicle 20 . Accordingly, the automatic transfer vehicle 20 can run along the suspended track 10, and transfer a wafer box (FOUP) F loaded with multiple wafers from a loading port (Load port) on a machine to the Another loading end (not shown), or transfer the wafer cassette F to another machine (not shown) after the predetermined process is completed on the same machine.

[0051] Please refer to figure 2 , is a pers...

no. 2 example ］

[0060] see Image 6 , is a perspective view of the lifting device of the second embodiment of the present invention. As shown in the figure, the difference of this embodiment is that the automatic transfer vehicle 20' also has a second drive assembly 22, a sliding frame 23 is provided under the slide rail 21, and a lifting base 31' is further provided with a Visual detection device 315. Therefore except the automatic pallet truck 20' and the lifting base 31', all the other component numbers are the same as those of the first embodiment.

[0061] Please refer to Figure 7 and 8 , is a schematic diagram of alignment between the lifting base and the wafer cassette according to the second embodiment of the present invention. In this specific embodiment, an identification mark M opposite to the lifting base 31' is provided on the top of the wafer box F for identification by the visual inspection device 315. In order to achieve the above-mentioned purpose, the sliding frame 23 ...

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PUM

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Abstract

The instant disclosure relates to a lifting device for transporting a wafer carrier to an automatic handling system including a suspension rail and an automatic guiding vehicle configured to move along the suspension rail, comprising an elevating holder, a plurality of suspension modules, and a plurality of first drive modules. Specially, the elevating holder has a motion sensor configured to detect whether the elevating holder is in a horizontal state or a non-horizontal state. The first drive modules can be used to synchronously drive the suspension modules according the horizontal state detected by the motion sensor, and the first drive modules can also be used to individually drive each of the suspension modules according the non-horizontal state detected by the motion sensor to recover the elevating holder from the non-horizontal state as the horizontal state.

Description

technical field [0001] The invention relates to a hoisting device, in particular to a hoisting device applied to a wafer carrying device in a semiconductor wafer factory and an automatic handling system thereof. Background technique [0002] With the continuous improvement of the wafer manufacturing process and the consideration of economic scale and cost-effectiveness, the area of ​​the wafer has increased from 300mm to 450mm, and it is bound to develop to a larger size in the future, so that the operator cannot directly handle it and must rely on automatic handling devices or system. Accordingly, the operation performance of the handling device / system will directly affect the production capacity performance of the semiconductor factory. In other words, the handling device / system must maintain high stability and high performance to meet production requirements. [0003] At present, semiconductor fabs mostly rely on suspension type hoist devices and overhead hoist transfer ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B65G49/07B65G47/04
CPCB66C19/00H01L21/67763H01L21/67259H01L21/68742
Inventor 廖桓祺张胜荣
Owner MICRON TECH INC
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