Device and method for machining microstructures using triangular pyramid microprobe trajectory motion
A trajectory motion, triangular pyramid technology, applied in microstructure devices, manufacturing microstructure devices, microstructure technology, etc., can solve problems such as reducing processing efficiency, affecting workpiece machining accuracy, surface quality, and complex deburring process.
Active Publication Date: 2016-02-17
HARBIN INST OF TECH
View PDF8 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
In addition, when micro-milling is used to process metal samples with good ductility, burrs are often generated on the edges of the processing structure, which directly affects the processing accuracy and surface quality of the workpiece, and the deburring process is not only complicated but also reduces processing efficiency
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment Construction
[0027] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings, but it is not limited thereto. Any modification or equivalent replacement of the technical solution of the present invention without departing from the spirit and scope of the technical solution of the present invention should be covered by the present invention. within the scope of protection.
[0028] Such as figure 1 As shown, the processing device based on microprobe trajectory movement provided by the present invention includes a support, a z-direction coarse motion positioning platform 1, a three-dimensional piezoelectric displacement platform 2, a triangular pyramid microprobe 3, an optical microscope 4, and a two-dimensional adjustment platform 6. The two-dimensional workbench 7, wherein: the two-dimensional workbench 7 is composed of an x-direction mobile platform and a y-direction mobile platform installed vertically, the x-direction m...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
| Property | Measurement | Unit |
|---|---|---|
| diameter | aaaaa | aaaaa |
Login to View More
Abstract
The invention discloses a device and a method for processing a microstructure by utilizing the track movement of a triangular-pyramid microprobe. The device comprises a support, a z-direction coarse-movement positioning platform, a three-dimensional piezoelectric displacement platform, the triangular-pyramid microprobe, an optical microscope, a two-dimensional leveling platform and a two-dimensional working platform, wherein the two-dimensional working platform is fixed on the support; the two-dimensional leveling platform is fixed on the two-dimensional working platform; the triangular-pyramid microprobe is positioned above the two-dimensional leveling platform and is rigidly connected with the three-dimensional piezoelectric displacement platform; the three-dimensional piezoelectric displacement platform is connected with the z-direction coarse-movement positioning platform; the optical microscope is fixed on the support and is used for observing the distance between the triangular-pyramid microprobe and a metal sample. The device and the method disclosed by the invention have the advantages that geometrical and asymmetric triangular-pyramid microprobe is adopted to carry out circumferential revolution track movement, so that the front angle of a cutter in each rotary cutting is changed continuously, the determined feeding direction is controlled for processing, and the microstructure with small burrs can be obtained by processing the surface of the metal sample.
Description
technical field [0001] The invention belongs to the field of micro-nano structure processing, and relates to a device and a method for mechanically processing complex nano-structures based on the same marking direction of an AFM probe. Background technique [0002] Micro-miniaturization technology has greatly promoted the research in the field of micro-nano, and is widely used in many industrial fields, such as information technology, medical treatment, biochemistry, and automobiles. In order to meet the size requirements required for tiny components and tiny structures, the corresponding micro-nano processing technology has developed rapidly. At present, micro-nano processing technology mainly includes: micro-cutting processing technology, micro-EDM technology and etching processing technology. Among them, micro-machining technology has been widely studied by scholars because of its advantages such as high flexibility of processing system and wide range of processing mater...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): B81C1/00
Inventor 闫永达薛勃赵学森胡振江
Owner HARBIN INST OF TECH