Detection method for aligning mask plate in optical alignment

Abstract

The invention discloses a detection method for aligning a mask plate in optical alignment. The detection method comprises an exposure machine platform, an optical detector, an alarm, a glass substrate and a mask plate, wherein the optical detector is arranged on the exposure machine platform, the alarm is connected with the optical detector; the mask plate comprises a light-transmitting area and a non-light-transmitting area. The detection method comprises the following steps: the optical detector is arranged on a projection area of the non-light-transmitting area of the mask plate on the exposure machine platform; the mask plate and the glass substrate are aligned by the exposure machine platform, and UV2A exposure process is carried out; if the mask plate is displaced, the optical detector receives UV light; signals are transmitted to the alarm of the exposure machine platform, and then the alarm gives an alarm; the machine platform stops working; the mask plate and the glass substrate are readjusted for alignment. By adoption of the detection method, in the process of exposure scanning, not only can the accuracy of alignment of the UV2A mask plate be ensured, but also the working of the exposure machine platform can be stopped in time when the displacement occurs, so that a great amount of loss on the production is avoided.

Description

technical field [0001] The invention relates to the field of liquid crystal display manufacturing, in particular to a method for detecting the alignment of a mask plate during optical alignment. Background technique [0002] With the development of the information society, people have higher and higher requirements for display devices. Among flat panel display devices, VA (Vertical Alignment, vertical alignment display mode), IPS (In Plan Switch, in-plane switch display mode) and other widely used Viewing angle display technology has been developed by leaps and bounds. Furthermore, UV 2 A light alignment technology is more popular in the TFT-LCD manufacturing industry. [0003] UV 2 A (Ultra Violet Vertical Alignment) technology is a VA (Vertical Alignment, vertical alignment) panel technology that uses ultraviolet light (UV=UltraViolet) for liquid crystal alignment. Its name comes from the multiplication of ultraviolet UV and liquid crystal panel VA mode. By importing U...

AI Technical Summary

Problems solved by technology

[0005] However, due to the current panel pixel line width getting smaller and smaller, and the drift of the process capability, the line width of the traced pattern is too small, or the CCD sensor for tracking the panel pixel is aging, so that the CCD cannot detect the original tracking alignment pattern. And track other alignment patterns in the pixel, so that the UV 2 A. The mask plate is displaced, causing the exposure direction to be wrong. If the machine does not stop working at this time, it will cause a lot of losses on the production line.

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