Miniature spectroscopic ellipsometer device and measuring method

Abstract

The invention discloses a miniature spectroscopic ellipsometer device used for measuring a nano-film sample. The miniature spectroscopic ellipsometer device comprises a light source and collimating lens integrated module, a spectroscope, a polarization modulation module and a polarization detection module, wherein the light source and the collimating lens integrated module are arranged on one side of the spectroscope; the polarization modulation module comprises a polarizer, a phase retarder, a diaphragm and a convergence lens; incident light beams sequentially pass through the polarizer, the phase retarder, the diaphragm and the convergence lens, are then incident on the surface of a to-be-detected sample piece on a sample stage and are reflected; the reflected light beams pass through the convergence lens and the diaphragm, then pass through the phase retarder again to be modulated, and are converged by the convergence lens to obtain a plurality of light spots after being subjected to polarization detecting by the polarizer, dispersion convergence is performed on the light spots by a micro lens grating module, so that lights with the same wavelengths are converged on the same point on a receiving plane of a detector, and optical intensity signals of a plurality of different polarization modulation passages can be obtained. The invention further discloses a measuring method based on the miniature spectroscopic ellipsometer device. A light path is more compact, the overall volume reaches the centimeter magnitude, and the sample detection time and the calculation time are remarkably shortened.

Description

technical field [0001] The invention belongs to the field of detection and measurement, and in particular relates to a measurement method and a miniaturized device for performing rapid spectral ellipsometric analysis on surface and film samples. Background technique [0002] The reflection or transmission of the light wave through the surface of the structure to be tested, its polarization state (including amplitude ratio and phase difference) is modulated, so that the polarization state of the light before and after passing through the surface of the structure to be tested changes. The ellipsometry method obtains the information (such as refractive index and thickness) of the sample by measuring this polarization state change. Since Drude first proposed the ellipsometer theory in 1877 and Rothen first proposed the concept of "Ellipsometer" (ellipsometer) in 1945, after nearly a hundred years of development, ellipsometers have been developed on the basis of the earliest comm...

AI Technical Summary

Problems solved by technology

[0011] Aiming at the problems of large volume and long measurement time in existing ellipsometers, the present invention provides a miniaturized spectroscopic ellipsometer device and measurement method

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