Miniature spectroscopic ellipsometer device and measuring method
A technology of spectroscopic ellipsometer and light source, which is applied in the field of detection and measurement, can solve the problems of long measurement time and large volume of ellipsometer, and achieve the effects of increased sample measurement time, compact system optical path, and improved calculation time
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[0036] In order to make the objectives, technical solutions and advantages of the present invention clearer, the following further describes the present invention in detail with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention, but not to limit the present invention. In addition, the technical features involved in the various embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.
[0037] Such as figure 1 , This embodiment provides a miniaturized spectroscopic ellipsometer device. The measurement method will be described in detail below in conjunction with the device.
[0038] The device is centered on a beam splitter 40, and the left side integrates a light source 10, a collimator lens 20 and a diaphragm 30. The light source 10 is used to generate light covering a certain spectral...
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