Thin film transistor and preparing method for thin film transistor
A technology of thin film transistors and semiconductors, applied in the direction of transistors, semiconductor/solid-state device manufacturing, semiconductor devices, etc., can solve the problems of small on-state current, short channel, and slow switching speed of thin-film transistors, etc., to increase the on-state current, fast The effect of switching speed
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[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0033] see figure 1 , figure 1 It is a schematic cross-sectional structure diagram of a thin film transistor according to a preferred embodiment of the present invention. The thin film transistor 100 includes a substrate 110 , and a gate 120 , a gate insulating layer 130 , a first semiconductor layer 140 , an etching stopper layer 150 and a second semiconductor layer 160 are sequentially stacked on the surface of the substrate 110 . The TFT 100 further inclu...
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