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Thin film transistor and preparing method for thin film transistor

A technology of thin film transistors and semiconductors, applied in the direction of transistors, semiconductor/solid-state device manufacturing, semiconductor devices, etc., can solve the problems of small on-state current, short channel, and slow switching speed of thin-film transistors, etc., to increase the on-state current, fast The effect of switching speed

Active Publication Date: 2015-04-29
TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, increasing the width of the channel in the thin film transistor will reduce the aperture ratio of the liquid crystal display device; reducing the length of the channel of the thin film transistor will cause the short channel effect
To sum up, the on-state current of thin film transistors in the prior art is relatively small, resulting in slow switching speed of thin film transistors

Method used

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  • Thin film transistor and preparing method for thin film transistor
  • Thin film transistor and preparing method for thin film transistor
  • Thin film transistor and preparing method for thin film transistor

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Embodiment Construction

[0032] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0033] see figure 1 , figure 1 It is a schematic cross-sectional structure diagram of a thin film transistor according to a preferred embodiment of the present invention. The thin film transistor 100 includes a substrate 110 , and a gate 120 , a gate insulating layer 130 , a first semiconductor layer 140 , an etching stopper layer 150 and a second semiconductor layer 160 are sequentially stacked on the surface of the substrate 110 . The TFT 100 further inclu...

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Abstract

The invention provides a thin film transistor and a preparing method for the thin film transistor. The thin film transistor comprises a substrate, a grid, a grid insulating layer, a first semiconductor layer, an etching barrier layer, a second semiconductor layer, a source and a drain, wherein the grid, the grid insulating layer, the first semiconductor layer, the etching barrier layer and the second semiconductor layer are sequentially arranged on the surface of the substrate in a stacked mode, and the source and the drain cover the two ends of a second semiconductor respectively. The etching barrier layer is provided with a first penetrating hole and a second penetrating hole, wherein the first penetrating hole and the second penetrating hole correspond to the source and the drain respectively, the source is connected with the first semiconductor layer through the first penetrating hole, and the drain is connected with the second semiconductor layer through the second penetrating hole. The thin film transistor can effectively increase on-state currents of the thin film transistor and has higher on-off speed.

Description

technical field [0001] The invention relates to the field of liquid crystal display, in particular to a thin film transistor and a preparation method of the thin film transistor. Background technique [0002] A thin film transistor (thin film transistor, TFT), as a switching element, is widely used in electronic devices such as liquid crystal display devices. Thin film transistors have attracted extensive attention because they can be applied to high resolution (high pixels per inch, high PPI) display devices. For thin film transistors, a high on-state current can increase the switching speed of the transistor. In order to increase the on-state current of the thin film transistor, it is common practice to increase the width of the channel in the thin film transistor or decrease the length of the channel. However, increasing the channel width of the thin film transistor will reduce the aperture ratio of the liquid crystal display device; reducing the channel length of the t...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L29/786H01L21/336
CPCH01L29/66742H01L29/786H01L29/78696H01L29/41733H01L29/66765H01L29/78669H01L29/78678
Inventor 石龙强曾志远李文辉苏智昱吕晓文
Owner TCL CHINA STAR OPTOELECTRONICS TECH CO LTD
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