Multi-station micro-positioning line displacement measuring device

Abstract

The invention belongs to a linear displacement measuring device, and specifically discloses a multi-station multi-degree-of-freedom high-precision micro-positioning linear displacement measuring device. The device comprises a reference carrier, a measuring clamping structure which is fixed on the reference carrier, a measuring driving structure fixed on the reference carrier, and a multi-degree-of-freedom which is positioned on the reference carrier and can be driven by the measuring driving structure to move relative to the reference carrier; the measuring clamping structure, the multi-degree-of-freedom adjusting device and the measuring driving structure are in the same straight line; the multi-degree-of-freedom adjusting device moves in the straight line direction. With the adoption of the device, the measurement time is reduced, the working efficiency is increased, and the quantity of bought devices and economic cost are saved; the multi-degree-of-freedom adjusting device is convenient to operate, flexible to perform, small in size and high in stability; a high-precision ball screw is used as a connecting device and can effectively reduce the fitting error of the system as well as improving the measurement precision.

Description

technical field [0001] The invention relates to a linear displacement measuring device, in particular to a multi-station, multi-degree-of-freedom, high-precision micro-positioning linear displacement measuring device. Background technique [0002] With the widespread use of high-precision non-contact LVDT displacement sensors on strategic and carrier models, the detection of the linearity of LVDT displacement sensors requires a high-precision linear displacement measurement device. The length measuring instrument imported from Sweden currently used in the workshop is mainly used for the supporting measurement of the high and low temperature of the displacement sensor and the electronic box, as well as the matching measurement of the displacement sensor and the differential pressure sensor. It has only one station and one length measuring instrument The high and low temperature matching measurement of only one sensor and electronic box requires two workers at the same time, s...

AI Technical Summary

Problems solved by technology

The length measuring instrument imported from Sweden currently used in the workshop is mainly used for the supporting measurement of the high and low temperature of the displacement sensor and the electronic box, as well as the matching measurement of the displacement sensor and the differential pressure sensor. It has only one station and one length measuring instrument Only one sensor and electronic box can be used to measure the high and low temperature, and two workers are needed at the same time, so the work efficiency is low and the production cost is too high. In the case of mass production of products, it is obviously unable to meet the requirements of productivity.

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