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Differential Vibration Acceleration Sensor Based on Segmented PSD

A vibration acceleration and differential technology, which is applied in the direction of acceleration measurement, instruments, and measuring devices using inertial force, can solve the problems of output displacement reduction, application limitations of piezoelectric sensors, hysteresis characteristics change, etc., and reach the working temperature Effects of wide range, reduced adverse effects, and high sensitivity

Inactive Publication Date: 2017-06-23
CHINA JILIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Due to the linear expansion and output displacement reduction caused by crystal temperature characteristics, as well as the change of hysteresis characteristics, the application of piezoelectric sensors in the field of high-precision measurement is limited

Method used

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  • Differential Vibration Acceleration Sensor Based on Segmented PSD

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Embodiment Construction

[0013] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0014] figure 1 The differential vibration acceleration sensor based on the segmented PSD shown is composed of a base (1), a packaging shell (2), a semiconductor laser (3), a beam splitting prism (4), a fixture (5), a reference mirror (6), elastic Material block (7), preload spring (8), screw (9), section PSD1 (10), section PSD2 (11), measuring mirror (12), mass block (13), fixing hole (14) . The semiconductor laser (3) is fixed on the lower left corner of the packaging casing (2), the beam splitting prism (4) is placed in the middle left of the packaging casing (2) through the clamp (5), and the incident surface of the beam splitting prism (4) is perpendicular to the incident laser light. The mass block (13) is rigidly connected to the elastic material block (7) through the screws (9) on both sides of the upper surface and the prel...

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Abstract

The invention discloses a differential vibration acceleration sensor based on a segmented PSD, which consists of a base, a packaging shell, a semiconductor laser, a beam splitting prism, a clamp, a reference mirror, an elastic material block, a preloaded spring, screws, a segmented PSD1, Subsection PSD2, composed of measuring mirror, quality block and fixing hole. The laser light emitted by the semiconductor laser passes through the beam splitting prism to generate mutually perpendicular incident light, which is respectively incident on the reference mirror and the measuring mirror, and then reflected to the photosensitive surface of the subsection PSD1 and subsection PSD2 respectively; when there is vibration, the reflection spot of the measurement mirror will deviate from the midpoint of PSD1 , form a differential measurement structure based on subsection PSD1 and subsection PSD2, and measure the magnitude of the vibration acceleration through the difference between the reference mirror and the measurement mirror reflection spot position offset, the invention has high sensitivity, wide operating temperature range and simple configuration circuit , has a good application prospect.

Description

technical field [0001] The invention belongs to the technical field of vibration measurement and detection, and in particular relates to a differential vibration acceleration sensor based on a segmented PSD. Background technique [0002] In the process of industrial production, the aging of equipment components and the loosening of connectors are often accompanied by abnormal vibration. Measuring and analyzing the vibration phenomenon of equipment is very important to suppress possible hidden dangers. [0003] At present, the most commonly used vibration sensor is a piezoelectric vibration sensor based on piezoelectric effect, and its sensitive element is made of piezoelectric crystal. Due to the linear expansion and output displacement reduction caused by crystal temperature characteristics, as well as the change of hysteresis characteristics, the application of piezoelectric sensors in the field of high-precision measurement is limited. [0004] Photoelectric position de...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01H9/00G01P15/03
Inventor 包立峰沈常宇
Owner CHINA JILIANG UNIV