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Air filter device for semiconductor equipment

A semiconductor and air filtering technology, which is applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve problems such as the influence of wafer process accuracy and uneven air flow in the air supply system, so as to save reprocessing time and meet effective requirements. The effect of working accuracy and saving working time

Inactive Publication Date: 2015-05-13
SHENYANG KINGSEMI CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] In view of the above problems, the object of the present invention is to provide an air filter device for semiconductor equipment, which solves the problem that the accuracy of the wafer process is easily affected by the uneven air flow of the existing equipment.

Method used

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  • Air filter device for semiconductor equipment
  • Air filter device for semiconductor equipment
  • Air filter device for semiconductor equipment

Examples

Experimental program
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Embodiment Construction

[0018] The present invention will be further described below in conjunction with the drawings.

[0019] Such as figure 1 , figure 2 As shown, it includes a box body and an air filter plate 1, wherein a plurality of air filter holes are evenly distributed on the air filter plate 1, and the box body is provided with a multi-layer air filter structure, and each layer of the air filter structure is provided with There are multiple air filtering areas, and each air filtering area is provided with air filter plates 1 with air filter holes of different apertures. The two ends of the air filter plate 1 are installed on the inner wall of the box body through the air filter plate frame 2. Below the air filter plate 1 is provided an addable air filter plate 4 smaller in size than the air filter plate 1, and the addable air filter plate 4 is installed on the air filter plate 1 through an addable air filter plate rack 3 Below, it is possible to systematically improve the equipment's process...

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PUM

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Abstract

The invention relates to the technical field of air supply systems for semiconductor equipment, and specifically relates to an air filter device for semiconductor equipment. The air filter device comprises a box body and air filter plates. Multiple layers of air filter structures are arranged in the box body. One air filter plate is detachably mounted in each layer of air filter structure. Multiple air filter holes are uniformly distributed on each air filter plate. Each layer of air filter structure is provided with multiple air filter regions inside, and the air filter regions are internally provided with the air filter plates with air filter holes of different apertures. Adjustment can be made according to the non-uniformity of air distribution of an air supply system to ensure the accuracy of air flow of an operation region in production and maintenance.

Description

Technical field [0001] The invention relates to the technical field of an air supply system for semiconductor equipment, in particular to an air filter device for semiconductor equipment. technical background [0002] In the production process of semiconductor wafers in the front-end process, due to the complexity and high cost of the process, the requirements for wafer production capacity and yield are very strict. In the actual production of semiconductor equipment, the non-uniformity of temperature, humidity and air flow inside the equipment often leads to a reduction in production capacity and failure to meet the product qualification rate. At this stage, the air supply system directly exhausts air to the work area, and the unevenness of the air supply system cannot guarantee the wafer process requirements, and requires multiple adjustments, which seriously affects the operation time and reduces the qualified product rate. Summary of the invention [0003] In view of the abov...

Claims

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Application Information

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IPC IPC(8): H01L21/67
CPCH01L21/67H01L21/67011
Inventor 郭聪胡延兵
Owner SHENYANG KINGSEMI CO LTD