Anti-drop jaw system for oht platforms

Abstract

The invention provides an anti-drop clamping jaw system for an OHT platform. The anti-drop clamping jaw system comprises a DSP driver module, a motor, a clamping jaw, an anti-drop arm and a sensor, wherein the DSP driver module is in signal connection to the anti-drop arm and the clamping jaw by virtue of the motor; the sensor is used for detecting the position information of the anti-drop arm and the clamping jaw and feeding the position information back to the DSP driver module; the DSP driver module controls the motion of the clamping jaw so as to grip and release the materials according to the position signal; and the DSP driver module is used for controlling the opening and closing of the anti-drop arm so as to prevent the materials from dropping according to the position signal. According to the anti-drop clamping jaw system provided by the invention, the condition that FOUP is damaged or the staff are injured due to accidental drop of FOUP can be avoided.

Description

technical field [0001] The invention relates to the technical field of semiconductor processing, in particular to an anti-drop jaw system for an OHT platform. Background technique [0002] With the rapid development of automation technology, the trend of using automated machinery and equipment instead of manpower on the factory production line is becoming more and more obvious. Among them, the handling system is the most common automation application scenario, which can solve the problem of insufficient human strength. The handling system includes conveyor belt handling and air transportation systems. [0003] Among them, the air transportation system (OHT; Over-head-Hoist-Transportation) can directly transport materials (FOUP; FrontOpeningUnifiedPod) to the equipment. Because OHT has greater spatial freedom and can handle more complex spatial operations. [0004] In the prior art, the grabbing structure of the crane is usually composed of a system controller, a servo dri...

AI Technical Summary

Problems solved by technology

Disadvantages are as follows: First, the servo drive device needs to be purchased separately, but the drives with better performance are usually products of foreign companies, and the purchase cost is very high; second, the servo structure is used to achieve position control, and the software level structure is complicated; The control strategy of the device is implemented by the upper controller, which takes up a lot of resources in the task management of the terminal system

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