Vertical current regulative diode and manufacturing method thereof

A constant current diode, vertical technology, applied in semiconductor/solid-state device manufacturing, electrical components, circuits, etc., can solve the problems of poor constant current capability, low breakdown voltage, low pinch-off voltage, etc., to save manufacturing costs, Good constant current capability and increased flexibility

Active Publication Date: 2015-05-20
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Aiming at the problems of high pinch-off voltage, low breakdown voltage and poor constant current capability of constant current diodes, the present invention proposes a vertical constant current diode and its manufacturing method. The vertical constant current diode of the present invention

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  • Vertical current regulative diode and manufacturing method thereof
  • Vertical current regulative diode and manufacturing method thereof
  • Vertical current regulative diode and manufacturing method thereof

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Embodiment

[0049] This embodiment takes a vertical constant current diode with a withstand voltage of 250V and a current of about 1.5E-5A / μm as an example to describe the technical solution of the present invention in detail.

[0050] With the help of TSUPREM4 and MEDICI simulation software for example figure 2 The cell of the vertical constant current diode shown in the process simulation is carried out. The simulation parameters are: the thickness of the initial silicon wafer is about 250 μm, and the concentration of N-type heavily doped substrate 2 is 1E19cm -3 ; N-type lightly doped epitaxial layer 3 has a thickness of 22 μm and a concentration of 8E14cm -3 The depth of the symmetrical two first diffused P-type well regions 4 is about 5 μm, the width is about 11.2 μm, the distance between the two first diffused P-type well regions 4 is 8 μm, and the dose of boron implanted is about 1.5E13cm -2 , the implantation energy is 120keV, and the push junction time is 200 minutes; -2 , the...

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Abstract

The invention provides a vertical current regulative diode and a manufacturing method thereof, and belongs to the technical field of semiconductors. The vertical current regulative diode provided by the invention comprises a cell structure and a terminal structure which are connected in sequence; the cell structure consists of a plurality of cells which are identical in structure and are connected in sequence; the terminal structure consists of a cut-off ring and a plurality of field limiting rings connected in sequence; the cells are located between a first N-type heavily doped region and an N-type lightly doped epitaxial layer and are respectively embedded into the upper surfaces of first P-type diffusion well regions to form depletion channel regions. According to the vertical current regulative diode provided by the invention, electricity is conducted by the depletion channel regions, so that the depletion channel regions are pinched off earlier than a JFET (junction field-effect transistor) region, and the pinching-off voltage is as low as 5V or less; moreover, after the depletion channel regions are pinched off, current is not increased with the increase of the voltage, so the dynamic impedance is high, and the current regulation capacity is good.

Description

technical field [0001] The invention belongs to the technical field of semiconductors, and in particular relates to a vertical constant current diode and a manufacturing method thereof. Background technique [0002] The constant current source is a commonly used electronic equipment and device, and it is widely used in electronic circuits. The constant current source is used to protect the entire circuit, even if the voltage is unstable or the load resistance changes greatly, it can ensure the stability of the supply current. A constant current diode (CRD, Current Regulative Diode) is a semiconductor constant current device, that is, a diode is used as a constant current source instead of an ordinary constant current source composed of transistors, Zener tubes and resistors. Currently, constant current diodes The output current is between a few milliamps and tens of milliamperes, which can directly drive the load, achieving the purpose of simple circuit structure, small dev...

Claims

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Application Information

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IPC IPC(8): H01L29/861H01L29/06H01L21/329
Inventor 乔明张康何逸涛代刚张波
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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